一种基于通孔技术的新型石英音叉振子  

A New Tuning Fork based on Through-hole Technology

作　　者：高志祥 姜凡 李坡 Gao Zhixiang;Jiang Fan;Li Po(Nanjing China Electronics Panda Crystal Technology Corporation,Nanjing,China)

机构地区：[1]南京中电熊猫晶体科技有限公司,江苏南京

出　　处：《科学技术创新》2023年第2期54-57,共4页Scientific and Technological Innovation

摘　　要：石英具有很高的品质因数,因此用石英加工的频率元件也具有极高的稳定性,能大大提高系统的时间精度。32.768 KHz的表晶利用其压电效应产生精准可靠的时间基准,随着石英频率元件领域对半导体光刻技术的引入,适用于表贴型小型化表晶的音叉振子的研究正不断深入。介绍了音叉的基本工作原理及阻抗改进的凹槽技术,提出一种以通孔导通正反面槽电极的新型石英音叉振子方案,极大的缩短供电线路,减少电流流通过程中的电能损耗,提升音叉振子的低功耗性能,同时提高音叉结构的对称,在一定程度上提升表晶的性能稳定性。Quartz has a very high quality factor, so the frequency element processed with quartz also has a very high stability, which can greatly improve the time accuracy of the system. 32.768 KHz tuning fork crystal makes use of its piezoelectric effect to produce accurate and reliable time reference. With the introduction of semiconductor lithography technology in the field of quartz frequency components, the research on tuning fork for miniaturized surface crystal is deepening. Introduces the basic working principle of tuning fork and the notch technology of impedance improvement, and proposes a new type of quartz tuning fork vibrator with a through hole to conduct the positive and negative slot electrodes, which greatly shortens the power supply line,reduces the power loss in the current flow process, improves the low power consumption performance of tuning fork vibrator, and improves the symmetry of tuning fork structure, and to a certain extent, improves the stability of surface crystal performance.

关 键 词：石英 音叉振子 通孔 电极 低功耗 

分 类 号：TN752[电子电信—电路与系统]