基于InP工艺的小型化亚太赫兹人工表面等离子体激元传输线设计  

Design of Compact Sub-Terahertz Spoof Surface Plasmon Polariton Transmission Line Based on InP Technology

作　　者：朱华利 张勇[1] 黎雨坤 叶龙芳 魏浩淼 刘晓宇[1] 徐锐敏[1] 延波[1] Zhu Huali;Zhang Yong;Li Yukun;Ye Longfang;Wei Haomiao;Liu Xiaoyu;Xu Ruimin;Yan Bo(Fundamental Science on EHF Laboratory,University of Electronic Science and Technology of China,Chengdu 611731,Sichuan,China;Institute of Electromagnetics and Acoustics,School of Electronic Science and Engineering,Xiamen University,Xiamen 361005,Fujian,China;Shenzhen Research Institute of Xiamen University,Shenzhen 518057,Guangdong,China)

机构地区：[1]电子科技大学极高频复杂系统国防重点学科实验室,四川成都611731 [2]厦门大学电子科学与技术学院电磁声学研究院,福建厦门361005 [3]厦门大学深圳研究院,广东深圳518057

出　　处：《光学学报》2022年第21期198-203,共6页Acta Optica Sinica

基　　金：国家自然科学基金(61871072)。

摘　　要：提出了一种基于人工表面等离子体激元(SSPPs)的亚太赫兹片上传输线,并在InP工艺基础上对其进行了结构设计和实物加工。为减小传统矩形槽SSPPs结构的占地面积,提出了一种折叠型SSPPs结构,在相同的渐近频率下,该结构的占地面积缩小了57.2%。利用接地共面波导(GCPW)和阶梯渐变结构,实现了对SSPPs传输线的高效激励。利用太赫兹在片测试系统对该传输线进行了测试。测试结果表明,在110~170 GHz频带范围内,SSPPs传输线的插入损耗小于3 dB/mm,回波损耗优于12.5 dB,且实验结果与仿真结果具有较好的吻合度。A subterahertz onchip transmission line based on spoof surface plasmon polaritons(SSPPs)is proposed,and its structure is designed and processed by InP technology.In order to reduce the area occupied by the SSPPs structure with the conventional rectangular grooves,a folded SSPPs structure is proposed.With the same asymptotic frequency,the area occupied by the proposed structure is reduced by 57.2%.In addition,the efficient excitation of the folded SSPPs transmission line is realized by the grounded coplanar waveguide(GCPW)and a gradient transition structure.The SSPPs transmission line is measured by a terahertz onchip test system.Test results show that the insertion loss of the SSPPs transmission line is less than 3 dB/mm with the frequency band ranging from 110 to 170 GHz,and the return loss is better than 12.5 dB,which is in good agreement with the simulated ones.

关 键 词：表面光学 人工表面等离子体激元 传输线 InP工艺 太赫兹 在片测试 

分 类 号：TN811.5[电子电信—信息与通信工程]