压电陶瓷驱动器迟滞非线性误差的建模与分析  

Modeling and Analysis of Hysteresis Nonlinear Error of Piezoelectric Ceramic Actuator

作　　者：王义冬 李庆春 赵慧 WANG Yidong;LI Qingchun;ZHAO Hui(Army 92228 of PLA,Beijing 100074,China;Equipment Project Management Center,Naval Armament Department,Beijing 100074,China;Beijing Zhenxing Institute of Metrology and Measurement,Beijing 100074,China)

机构地区：[1]中国人民解放军92228部队,北京100074 [2]海军装备部装备项目管理中心,北京100074 [3]北京振兴计量测试研究所,北京100074

出　　处：《计算机测量与控制》2023年第2期196-203,共8页Computer Measurement &Control

摘　　要：压电陶瓷驱动器的最大迟滞非线性误差可以超过输出行程的15%,而快刀伺服系统(FTS)要求重复定位精度优于10 nm,相对线性度误差优于0.5%,压电陶瓷驱动器的误差无法满足该精度要求;首先对压电陶瓷迟滞非线性误差进行实验分析,将迟滞非线性误差分为频率无关迟滞现象和频率相关迟滞现象;接着对Bouc-Wen(BW)和Prandtl-Ishlinskii(PI)的频率无关迟滞模型进行修正和对比,确定了采用PI模型描述本文的频率无关迟滞现象,PI模型对频率无关迟滞曲线的辨识精度为0.392%;然后设计基于Hammerstein模型的频率相关迟滞模型,Hammerstein模型对频率相关迟滞曲线的辨识误差相比PI模型时,其均方根值降低了88.068%;提出了压电陶瓷驱动器迟滞非线性误差的建模方法,并分析了其有效性和准确性,给FTS伺服控制提供了一种实用的前馈控制器。The maximum hysteresis nonlinear error of piezoelectric ceramic actuator can exceed 15%of output displacement.,the repeated positioning accuracy and relative linearity error of fast tool servo(FTS)system is better than 10nm and 0.5%respectively,the errors of the piezoelectric ceramic actuator can not meet the requirement of the precision.Firstly,The hysteresis nonlinear error of piezoelectric ceramics is experimentally analyzed,and the hysteresis nonlinear error is divided into the hysteresis phenomena of frequency-independent and frequency-dependent Then,the frequency-independent hysteresis models of Bouc-Wen(BW)and Prandtl-Ishlinskii(PI)are revised and compared,and it is determined that the PI model is used to describe the frequency-independent hysteresis phenomenon in this paper.The identification accuracy of the PI model for the frequency-independent hysteresis curve is 0.392%.Then a frequency-dependent hysteresis model based on Hammerstein model is designed.Compared with the PI model,the root-mean-square value of Hammerstein model's identification error for the frequency-dependent hysteresis curve is reduced by 88.068%.Finally,a hysteresis nonlinear error modeling method of the piezoelectric ceramic actuator is proposed,and its validity and accuracy are analyzed,which provides a practical feedforward controller for FTS servo control.

关 键 词：压电陶瓷 迟滞非线性 BOUC-WEN模型 Prandtl-Ishlinskii模型 HAMMERSTEIN模型 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]