真空度对防蓝光镜片镀膜工艺的影响  

Effect of Vacuum Level on Anti-blue Light Lens Coating Process

作　　者：徐中辉[1] 陈李根 陈妍 赵书亮 刘川川 XU Zhonghui;CHEN Ligen;CHEN Yan;ZHAO Shuliang;LIU Chuanchuan(School of Information Engineering,Jiangxi University of Science and Technology,Ganzhou Jiangxi 341000,China;School of Electrical Engineering and Automation,Jiangxi University of Science and Technology,Ganzhou Jiangxi 341000,China)

机构地区：[1]江西理工大学信息工程学院,江西赣州341000 [2]江西理工大学电气工程与自动化学院,江西赣州341000

出　　处：《佳木斯大学学报（自然科学版）》2023年第1期74-78,共5页Journal of Jiamusi University：Natural Science Edition

基　　金：国家自然基金项目(11864014);江西理工大学优秀人才计划项目(3203304666)。

摘　　要：基于物理气相沉积镀膜技术可以实现防蓝光镜片镀膜工艺,采用高低折射率镀膜材料的搭配,在有害蓝光波段也即380-450nm处,达到90%及以上反射。改变炉内大气压强真空度,进而取得更好的防蓝光效果。实验结果表明:在镀膜材料、膜系参数、镀膜设备、开启离子源、烘烤温度等等对照条件均一致时,在炉内真空度为3.0E-3Pa时,可以达到很好的防蓝光效果,不仅可以节省成本,也大大提高镀膜的效率。利用物理气相沉积镀膜技术,在炉内真空度不一致的条件下,防蓝光效果也发生改变,此研究也为防蓝光镀膜工艺的研发提供了新的参考。This study is based on the physical vapor deposition coating technology can achieve anti-blue light lens coating process, using a combination of high and low refractive index coating materials to achieve 90% and above reflection in the harmful blue light wavelength band, namely 380-450nm. Changing the atmospheric pressure vacuum in the furnace will result in a better anti-blue light effect. The experimental results show that when the coating material, film system parameters, coating equipment, ion source, baking temperature and other control conditions are consistent, a good anti-blue effect can be achieved at a vacuum level of 3.0E-3Pa in the furnace, which not only saves cost but also greatly improves the efficiency of the coating. By using physical vapor deposition coating technology, the anti-blue effect also changes under the inconsistent conditions of the vacuum level in the furnace, and this study also provides a new reference for the development of anti-blue coating process.

关 键 词：物理气相沉积 镀膜工艺 真空度 有害蓝光波段 

分 类 号：TQ153.3[化学工程—电化学工业]