化学前处理对硬质合金基材及金刚石涂层性能的影响  

Effects of Chemical Pretreatment on Properties of Cemented Carbide Substrates and Diamond Coatings

作　　者：傅上 林松盛 范舒瑜 苏一凡 曾瑞霖 石倩 代明江 FU Shang;LIN Songsheng;FAN Suyu;SU Yifan;ZENG Ruilin;SHI Qian;DAI Mingjiang(State Key Laboratory of Cemented Carbide,Zhuzhou Cemented Carbide Group Co.Ltd.,Zhuzhou 412000,China;Institute of New Materials,Guangdong Academy of Sciences/National Engineering Laboratory of Modern Materials Surface Engineering Technology/Guangdong Provincial Key Laboratory of Modern Surface Engineering Technology,Guangzhou 510651,China)

机构地区：[1]硬质合金国家重点实验室,株洲硬质合金集团有限公司,湖南株洲412000 [2]广东省科学院新材料研究所/现代材料表面工程技术国家工程实验室/广东省现代表面工程技术重点实验室,广东广州510650

出　　处：《材料研究与应用》2023年第1期130-135,共6页Materials Research and Application

基　　金：广东省重点区域研发计划项目(2020B010185001);广东省科学院发展专项资金项目(2021GDASHY-0107,2022GDASZH-2022010103)。

摘　　要：为提高金刚石涂层与硬质合金基体的适配性,采用热丝化学气相沉积技术在YG6硬质合金表面制备金刚石涂层,利用扫描电镜、能谱仪、原子力显微镜和固体颗粒冲蚀试验仪分析检测了试样的表截面形貌、成分深度分布、表面粗糙度、抗砂粒冲蚀性能等,研究了不同化学前处理对基材和涂层性能的影响。结果表明:两步法前处理去除钴的深度约4—5μm,并且形成了厚约1—2μm的脱钴脆性层;三步法前处理去除钴的深度约14—15μm,没有出现脱钴脆性层;三步法化学前处理后沉积的金刚石涂层抗砂粒冲蚀时间为两步法化学前处理的4倍以上,并且涂层脱落区宽度仅为两步法化学前处理的1/8,说明三步法化学前处理后所沉积的金刚石涂层的性能比两步法的更优越。To improve the suitability of diamond coating tocemented carbide substrates,diamond coatings were prepared on YG6 cemented carbide by hot filament chemical vapor deposition.Scanning electron microscopy,energy dispersive spectroscopy,atomic force microscopy and solid particle erosion tester were used to analyze the surface morphology,composition depth distribution,surface roughness and sand erosion resistance of the samples.The effects of different chemical pretreatment on the substrate and coating properties were studied.The results show that the depth of cobalt removed by the two-step pretreatment is about 4—5μm,and a brittle layer of about 1—2μm is formed.By comparison,the depth of cobalt removed by three-step pretreatment is about 14—15μm,and no cobalt-depleted brittle layer is formed.The sand erosion resistance time of the diamond coating deposited after three-step chemical pretreatment is more than 4 times that of the two-step chemical pretreatment,and the width of the coating shedding area deposited after three-step chemical pretreatment is only 1/8 of that of the two-step chemical pretreatment.The diamond coating deposited by three-step chemical pretreatment shows better performance than that by two-step chemical pretreatment.

关 键 词：化学前处理 硬质合金 金刚石涂层 热丝化学气相沉积 

分 类 号：TG174[金属学及工艺—金属表面处理]