超高真空计微弱离子流检测技术研究  

Research on the Weak Ion Current Detection Technology of Ultra-high Vacuum Gauge

作　　者：姚鹏 李得天[1] 张虎忠[1] 葛金国 马卓娅 成永军[1] 阴怡媛 YAO Peng;LI Detian;ZHANG Huzhong;GE Jinguo;MA Zhuoya;CHENG Yongjun;YIN Yiyuan(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2023年第2期111-116,共6页Vacuum and Cryogenics

基　　金：国家自然科学基金(62171208)。

摘　　要：在超高真空环境下,Bayard-Alpert型电离真空计通过电离气体分子得到的离子流信号十分微弱,且极易受到干扰。介绍了一种用于超高真空测量的微弱信号检测系统,包括测量电路、调零电路与处理模块。该系统采用高精度放大器与高绝缘继电器,可以实现微弱信号的精密放大,满足mA级至亚pA级范围的宽量程电流信号检测;能够自动完成测量档位的切换、系统调零、数据处理与真空全压力值计算,测量下限可达10-13A量级,可用于超高真空计离子流的精确测量,具有良好的线性及稳定性。In ultra high vacuum environment,Bayard-Alpert ionization vacuum gauges generate ion current by ionizing gas molecules.This current signal is very weak and susceptible to interference.This paper introduces a weak signal detection system for ultra-high vacuum measurement,which can meet the wide range current signal detection from mA to subpA.It is composed of measurement module,zero adjustment module and processing module.High precision amplifier and highly insulating relay are selected to realize the precision amplification of weak signals. The system can automatically complete the measurement gear change,zero adjustment,data processing and pressure calculation. The lower limit of measurement up to 10-13A with good measurement linearity.It has been applied for the accurate measurement of ion flow of ultra high vacuum gauges,showing good measurement stability.

关 键 词：宽量程 微弱信号 超高真空测量 电离真空计 

分 类 号：TB772[一般工业技术—真空技术]