基于纳米孔结构的超高压石墨烯压力传感器设计  

Design of a pressure sensor based on nanopore structure and ultra-high-pressure graphene

作　　者：吴天金 孔丹 王俊强 WU Tianjin;KONG Dan;WANG Junqiang(School of Instrument and Electronics,North University of China,Taiyuan 030051,China;Institute of Frontier Interdisciplinary Research,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器与电子学院,山西太原030051 [2]中北大学前沿交叉学科研究院,山西太原030051

出　　处：《电子元件与材料》2023年第1期76-81,共6页Electronic Components And Materials

基　　金：国防科技173计划技术领域基金项目(2021JCJQJJ0172)。

摘　　要：设计了一种基于纳米孔结构的超高压石墨烯压力传感器。由于氮化硼的六方晶体结构与石墨烯的晶体结构高度相似,该传感器采用氮化硼/石墨烯/氮化硼的石墨烯复合异质敏感薄膜作为压力传感器的敏感材料,利用石墨烯薄膜材料的压阻效应对压力进行检测。为保证传感器在400 MPa的压力载荷下对压力精准的检测,采用数学理论模型计算出不同孔径的纳米孔上石墨烯复合异质薄膜的应变大小,通过有限元仿真软件对石墨烯圆形薄膜的压力进行仿真,得到了圆形薄膜的最优半径。可为超高压石墨烯压力传感的结构设计和性能优化提供一定参考。A pressure sensor was designed based on nanoporous structure and ultra-high-pressure graphene. Since boron nitride has highly similar hexagonal crystal structure to graphene, the sensor adopted(boron nitride/graphene)nmultilayer composite film as the sensitive material, which detects pressure by piezoresistive effect of graphene. To ensure accurate detection at the pressure load of 400 MPa, here we used a mathematical model to calculate the strain of the multilayer composite film on the nanopores at different pore sizes. Finite element simulation software was used to simulate the pressure of the graphene circular film to determine the optimal radius. This work could provide a certain reference value for the structural design and performance optimization of pressure sensor using ultra-high pressure graphene.

关 键 词：石墨烯 纳米孔 超高压 理论模型 有限元仿真 

分 类 号：TH823[机械工程—仪器科学与技术]