绝缘衬底的电流体喷印高分辨率微米电极研究  

Research on High-resolution Micron Electrode by Electro-fluid Jet Printing on Insulating Substrate

作　　者：佀萌 刘畅 张洁 戴恒震 Si Meng;Liu Chang;Zhang Jie;Dai Hengzhen(College of Optoelectronic Engineering and Instrument Science,Dalian University of Technology,Dalian,Liaoning 116024,China)

机构地区：[1]大连理工大学光电工程与仪器科学学院,辽宁大连116024

出　　处：《机电工程技术》2023年第2期16-19,共4页Mechanical & Electrical Engineering Technology

基　　金：国家自然科学基金面上项目(编号:51975104,62074138);国防基础研究项目。

摘　　要：基于电流体动力学喷射理论,建立了集控制、运动和成像于一体的电流体喷印设备。由函数发生器和高压放大器为打印提供正负交变电场,以银导电墨水为打印材料,通过空气压缩机、调压阀和喷头将打印材料喷出,并采用交流供电的策略,进行了绝缘衬底上微米级的图案化银电极打印成型研究。探索高绝缘玻璃基板上电流体喷射打印过程的机理,利用控制变量法明确了电压、打印速度和工作距离3个关键打印参量对银电极打印成型特征的影响法则。结果表明:银电极的尺寸与工作距离成正比,与电压、打印速度成反比。在此研发基础上,在5 mm的厚绝缘玻璃衬底上成功打印并制备了分辨率为70μm的银电极阵列结构和复杂图形,打印结构边缘清晰可见、表面平整平滑,显示出电流体喷射打印方法能够在毫米级别绝缘衬底上对微米级别结构进行高质高效按需生产。Based on electrohydrodynamic jet theory,an electrohydrodynamic jet printing equipment integrating control,motion and imaging was established.The function generator and high-voltage amplifier provided positive and negative alternating electric field for printing,and the silver conductive ink was used as the printing material.The printing material was sprayed out through the air compressor,the regulator valve and the nozzle,and the AC power supply strategy was adopted to study the micron-level schematic silver electrode printing molding on the insulating substrate.The mechanism of electro-fluid jet printing process on high insulating glass substrate was explored,and the influence law of three key printing parameters,namely voltage,printing speed and working distance,on the forming characteristics of silver electrode printing was clarified by using the control variable method.The results showed that the size of silver electrode is proportional to working distance and inversely proportional to voltage and printing speed.On the basis of this research and development,the silver electrode array structure and complex graphics with a resolution of 70μm were successfully printed and prepared on a 5 mm thick insulating glass substrate.The edge of the printed structure is clear and visible,and the surface is flat and smooth,indicating that the electro-fluid jet printing method is highly efficient and on-demand for the production of micron-level structures on millimeter-level insulating substrates.

关 键 词：绝缘衬底 电流体喷印 银电极 交流电压 

分 类 号：TN05[电子电信—物理电子学]