微谐振陀螺仪从半球到平面的演变  

Development of MEMS Resonator Gyroscope From Hemisphere to Plane

作　　者：谷留涛 张卫平[1] 崔峰[1] 吴雨婷 范重阳 卢浩琳 GU Liutao;ZHANG Weiping;CUI Feng;WU Yuting;FAN Chongyang;LU Haolin(National Key Laboratory of Science and Technology on Micro/Nano Fabrication,Shanghai Jiao Tong University,Shanghai 200240,CHN;Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,CHN)

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室,上海200240 [2]上海交通大学电子信息与电气工程学院微纳电子学系,上海200240

出　　处：《半导体光电》2022年第6期1011-1019,共9页Semiconductor Optoelectronics

摘　　要：微谐振陀螺仪是一种固体波动陀螺,常采用微纳制造工艺进行加工,具有小体积、高性能、低功耗、批量化等特点。自1975年世界上第一个半球谐振陀螺诞生以来,微谐振陀螺的谐振子拓扑结构经历了三维结构到二维结构的演变。文章以拓扑结构的发展脉络为主线,对微谐振陀螺的发展过程进行了梳理和总结,最后对目前存在的问题进行了分析,对未来的发展进行了展望。Micro-electro-mechanical(MEMS)resonator gyroscope is a kind of solid wave gyroscope,which is often fabricated by micro-nano fabrication technology,and has features of small size,low power consumption,low cost,and suitable for batch fabrication.Since the birth of the first hemispherical resonator gyroscope in the world in 1975,the structure topology of the MEMS resonator gyroscope has undergone a transformation from three-dimensional structure to two-dimensional structure.In this paper,the development of MEMS resonator gyroscope was summarized in the line of the development of topology.Finally,the current problems were analyzed and future development was prospected.

关 键 词：微谐振陀螺仪 微谐振器 半球陀螺仪 环形陀螺仪 四质量块陀螺仪 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]