MOEMS气体传感技术研究进展  

Advances in the Research on MOEMS Gas Sensing Technology

作　　者：蔡炜铭 任青颖 江彦虎 魏鸿飞 彭俊越 常春耘[2] 薛梅[1,2] CAI Weiming;REN Qingying;JIANG Yanhu;WEI Hongfei;PENG Junyue;CHANG Chunyun;XUE Mei(College of Electronic and Optical Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,CHN;National Experimental Teaching Demonstration Center of Electronic Science and Technology,Nanjing University of Posts and Telecommunications,Nanjing 210023,CHN)

机构地区：[1]南京邮电大学电子与光学工程学院,南京210023 [2]南京邮电大学电子科学与技术国家级实验教学示范中心,南京210023

出　　处：《半导体光电》2022年第6期1040-1048,共9页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61904089);江苏省自然科学基金项目(BK20190731);南京邮电大学教改项目(JG10621JX28)。

摘　　要：微光电子机械系统(MOEMS)气体传感技术是光学式气体传感器技术与MOEMS技术、新材料技术相结合的创新型技术方案。MOEMS气体传感器具有更低的价格、更高的集成度、更强的抗干扰能力,以及更高的测试精度。文章首先阐述了主要的光学气体传感系统的工作原理及系统结构,随后介绍了MOEMS气体传感技术中最新的微光学器件及微光学系统。通过对MOEMS气体传感器的主要研究成果和进展的综述,对未来MOEMS气体传感器的研究重点和研究挑战等进行了展望。MOEMS gas sensing technology is an innovative technological solution for optical gas sensing techniques combined with MOEMS technology and new materials.MOEMS gas sensor has many advantages such as lower cost,higher integration,stronger anti-interference,higher test accuracy and so on.Firstly,the structure and working principle of primary optical gas sensing systems were introduced.Subsequently,the latest achievements,microoptical devices and microoptical system in MOEMS gas sensing technology were introduced.Taking the current research status of the MOEMS gas sensing devices as clue,challenges and priorities of MOEMS gas sensor were discussed.

关 键 词：微光电子机械系统 气体传感器 光谱分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]