位置敏感探测器光斑脱靶误差补偿方法研究  

Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector

作　　者：李鑫 米良[1] LI Xin;MI Liang(Institute of Machinery Manufacturing Technology,Chinese Academy of Engineering Physics,Chengdu 610000,CHN)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,成都610000

出　　处：《半导体光电》2022年第6期1136-1141,共6页Semiconductor Optoelectronics

基　　金：技术基础科研项目(J0067-1922-FJC)。

摘　　要：为了提高位置敏感探测器(PSD)的位置检测范围,解决光斑在探测器光敏面脱靶时无法准确定位光斑的问题,提出一种光斑脱靶误差补偿方法,分析了脱靶前后PSD检测光斑能量重心变化规律,建立了PSD光强信号与位置检测误差间的函数关系。实验结果表明:当PSD光敏面尺寸为12 mm×12 mm时,对于半径为5 mm的高斯光斑,通过所提出的光斑补偿方案补偿后PSD的X轴检测范围提高了66.7%,位置检测平均相对误差不超过5%,该方法对提高PSD位置检测性能具有重要的意义。In order to extend the detection range of position sensitive detector,and solve the problem that the light spot cannot be accurately positioned when the light spot is off-target on the PSD photosensitive surface,a light spot off-target error compensation method is proposed.The variation law of the spot energy center of PSD detection before and after the off-target was analyzed,and the functional relationship between the PSD light intensity signal and the position detection error was established.The experimental results show that:when the size of the PSD photosensitive surface is 12 mm×12 mm,for a Gaussian light spot with a radius of 5 mm,the X-axis detection range of the PSD photosensitive surface is increased by 66.7%after compensation by the spot compensation method proposed in this paper,and the average relative error of position detection is no more than 5%.This method is important to improve the performance of PSD position detection.

关 键 词：测量 位置敏感探测器 高斯光斑 误差补偿 

分 类 号：TN247[电子电信—物理电子学]