Microcantilever sensors for biochemical detection  

作　　者：Jingjing Wang Baozheng Xu Yinfang Zhu Junyuan Zhao 

机构地区：[1]School of Electronic and Information Engineering,Tiangong University,Tianjin 300380,China [2]Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China

出　　处：《Journal of Semiconductors》2023年第2期66-76,共11页半导体学报（英文版）

基　　金：supported by National Science Foundation of China(61804107,61804150);National Key Research and Development Program of China(2022YFF0706102);Tianjin Municipal Science and Technology Bureau(20JCQNJC00180).

摘　　要：Microcantilever is one of the most popular miniaturized structures in micro-electromechanical systems(MEMS).Sensors based on microcantilever are ideal for biochemical detection,since they have high sensitivity,high throughput,good specification,fast response,thus have attracted extensive attentions.A number of devices that are based on static deflections or shifts of resonant frequency of the cantilevers responding to analyte attachment have been demonstrated.This review comprehensively presents state of art of microcantilever sensors working in gaseous and aqueous environments and highlights the challenges and opportunities of microcantilever biochemical sensors.

关 键 词：MICROCANTILEVER SENSOR biochemical detection MEMS 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH-39[自动化与计算机技术—控制科学与工程]