亚50 nm台阶高度标准物质的可控制备及定值研究  

Study on the controllable fabrication and calibration of sub-50 nm step height reference materials

作　　者：张雅馨 王琛英[1,2] 景蔚萱[1] 施玉书[3] 蒋庄德[1] Zhang Yaxin;Wang Chenying;Jing Weixuan;Shi Yushu;Jiang Zhuangde(State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China;Collaborative Innovation Center of High-End Manufacturing,Xi'an Jiaotong University,Xi'an 710049,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,西安710049 [2]西安交通大学高端制造装备协同创新中心,西安7710049 [3]中国计量科学研究院,北京100029

出　　处：《仪器仪表学报》2022年第11期86-93,共8页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(52175434)项目资助。

摘　　要：纳米台阶高度标准物质可以传递准确、可溯源的纳米高度量值。针对我国缺乏可控的高质量亚50 nm台阶高度标准物质制备技术的问题,提出了基于原子层沉积结合湿法刻蚀的纳米台阶高度标准物质研制方法,通过工艺过程优化实现了台阶高度亚纳米量级精确可控,制备出了最小公称高度仅为5 nm的亚50 nm台阶高度标准物质系列。其定值结果可溯源到米定义波长基准,扩展不确定度不超过2.0 nm,均匀性和稳定性较好,不同测试仪器一致性水平较高。研究结果表明,所研制的纳米台阶高度标准物质可以用于亚50 nm高度量值传递以及多种测量仪器之间量值的比对测量,其产业化批量生产的前景也将为半导体产业提供完善的计量保障。The nano-step height reference materials can deliver accurate and traceable nanometer height characteristic parameters.To investigate the fabrication technique of high-quality sub-50 nm step height reference materials in China,a method based on atomic layer deposition combined with wet etching is proposed.The sub-50 nm step height reference materials with a minimum height of only 5 nm are fabricated through process optimization,which achieves the precise control of the step height in the order of the sub-nanometer.The calibration results are traceable to the national meter-defined wavelength reference,and the extended uncertainty is less than 2.0 nm.Meanwhile,the reference materials has excellent uniformity and stability,and the consistency level of different measurement instruments is quite high.The results show that the nano-step height reference materials can be used for transmission of sub-50 nm height values and comparative measurement between multiple instruments.The prospect of their industrialized production will also provide a perfect metrology guarantee for the semiconductor industry.

关 键 词：台阶高度标准物质 亚50 nm 原子层沉积技术(ALD) 计量学 

分 类 号：TH711[机械工程—测试计量技术及仪器]