基于微焦点X射线光栅干涉仪的波前传感与面形测量技术  

Wavefront Sensing and Surface Shape Measurement Based on Microfocus X-Ray Grating Interferometer

作　　者：赵帅 王秋平[2] 张磊 王克逸[1] Zhao Shuai;Wang Qiuping;Zhang Lei;Wang Keyi(Department of Precision Machinery and Precision Instruments,University of Science and Technology of China,Hefei 230026,Anhui,China;National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,Anhui,China)

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230026 [2]中国科学技术大学国家同步辐射实验室,安徽合肥230029

出　　处：《光学学报》2022年第23期244-251,共8页Acta Optica Sinica

基　　金：国家重点研发计划(2016YFA0401303);中央高校基本科研业务费(WK5290000002)。

摘　　要：为了支撑高性能光源波前调控与先进实验技术开发,并在工作波长下实现实验室级面形测量,搭建了微焦点X射线光栅干涉仪实验平台。X射线光栅干涉仪是一种具有极高灵敏度的波前传感技术,可定量测量X射线波前畸变。利用相位步进和傅里叶分析方法重建条纹的相位和波前曲率半径分布,进而计算出波前角度和镜面斜率误差分布。傅里叶分析方法的测量结果与长程面形仪具有很好的一致性,两者差值的均方根小于200 nrad。所提技术可用于X射线主动光学波前在线反馈调控,反射、折射、衍射器件误差检测,以及大科学装置X射线光束质量评估等领域。An experimental platform based on a microfocus X-ray grating interferometer is established to support the wavefront control of high-performance light sources and the development of advanced experimental technologies, and facilitate laboratory-level surface shape measurement at a working wavelength. X-ray grating interferometry is a highly sensitive wavefront sensing technique and can be used to quantitatively measure the X-ray wavefront distortion.Furthermore, the phase of the fringes and the wavefront radius of curvature distribution are reconstructed by phase stepping and Fourier analysis, so as to calculate the wavefront angle and mirror slope error distribution. The measurement results obtained by Fourier analysis are in good agreement with the long trace profiler, with the root mean square of their difference less than 200 nrad. The proposed technique can be used for online wavefront feedback and control in X-ray active optics, error detection of reflection, refraction and diffraction devices, and quality evaluation of X-ray beams of large scientific devices.

关 键 词：X射线光学 X射线光栅干涉仪 波前传感 面形测量 

分 类 号：P234.3[天文地球—摄影测量与遥感] O434.1[天文地球—测绘科学与技术]