非平衡磁控溅射制备Cr掺杂DLC复合薄膜的高温摩擦学性能  

Tribological Properties of DLC Doped with Cr Element Prepared by Unbalanced Magnetron Sputtering at High Temperature

作　　者：孙建芳[1,2] 陈泽达 苏峰华 李助军[3] SUN Jianfang;CHEN Zeda;SU Fenghua;LI Zhujun(School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou Guangdong 510641,China;State Key Laboratory of Tribology,Tsinghua University,Beijing 100084,China;School of Mechanical and Electrical Engineering,Guangzhou Railway Polytechnic,Guangzhou Guangdong 510430,China)

机构地区：[1]华南理工大学机械与汽车工程学院,广东广州510641 [2]清华大学摩擦学国家重点实验室,北京100084 [3]广州铁路职业技术学院机械与电子学院,广东广州510430

出　　处：《润滑与密封》2023年第2期7-15,共9页Lubrication Engineering

基　　金：国家自然科学基金资助项目(52175168);广东省基础与应用基础研究项目(2022A1515010513);广州市科技计划项目(202102080422)。

摘　　要：元素掺杂是提升DLC薄膜摩擦学性能和耐温性能的重要途径。采用直流磁控溅射技术在304不锈钢基体表面沉积了含氢DLC薄膜,同时利用射频磁控溅射技术完成Cr元素的掺杂,研究Cr元素掺杂对DLC薄膜的力学性能及摩擦学性能的影响。采用纳米压痕仪测试薄膜硬度并利用划痕试验测试膜基结合力,采用拉曼光谱分析薄膜sp2和sp3键含量的变化和转移膜的生成。采用UMT多功能摩擦磨损试验机评价薄膜在常温和高温环境下的摩擦磨损性能,并利用扫描电镜观察磨损表面,分析其磨损机制。结果表明,Cr元素掺杂会显著提高薄膜的膜基结合力,但会使薄膜硬度有一定的下降。常温摩擦学性能测试显示,DLC薄膜的摩擦因数随着Cr含量的增加呈现出先下降后上升的趋势,在Cr质量分数为3.34%时达到最低;但薄膜的磨损率随Cr含量的增加略有升高。高温摩擦学性能测试表明,Cr元素掺杂显著改善了DLC薄膜的高温摩擦学性能,未掺杂的DLC在150℃以上摩擦时会失效,Cr元素掺杂使薄膜在250℃下也能保持较低的摩擦因数和较长的抗磨寿命。Cr元素的加入能够提高DLC薄膜的膜基结合力,降低摩擦因数,并提高薄膜的高温摩擦学性能,这主要是因为Cr元素掺杂促使薄膜结构发生转变,同时Cr的氧化物也起到了一定的保护作用。Doping is an important way to improve the thermal stability and tribological properties of diamond like carbon(DLC)films.The DC magnetron sputtering technology was used to deposit hydrogen containing DLC film on the surface of the 304 stainless steel substrate,and the radio frequency magnetron sputtering technology was used to complete the doping of Cr element in the film.Effect of the doping of Cr element on the mechanical properties and tribological properties of DLC films were studied.The film hardness was tested by nanoindentation test machine,and the bonding force of the film base was measured by the scratch experiment.Raman spectroscopy was used to analyze the changes in the sp~2 and sp~3 bond content and the existence of transfer film.UMT-TriboLab tribotest was employed to evaluate the tribological properties of Cr-doped DLC at room temperature and high temperature environment.The wear surface was observed by scanning electron microscope(SEM)to analyze the wear mechanism.The results show that the doping of Cr element greatly enhances the film-base bonding force,while the hardness of the film is slightly reduced.The tribo-tests at room temperature show that the friction coefficient of Cr-doped DLC film increases initially and then decreases with the increase of Cr content,and the Cr-doped DLC with Cr mass fraction of 3.53%possesses the lowest friction coefficient.However,the wear rate of the doped films of DLC is slightly higher than that of the pure DLC film at room temperature.The tribo-tests at high temperature exhibit that the doping of Cr element improves the high temperature tribological properties of the DLC film.The undoped DLC film fails when rubbed above 150℃,while the Cr doped DLC film maintains low friction coefficient and long anti-wear life at 250℃.The doping of Cr element improves the bonding strength,reduces the friction coefficient and enhances the high temperature tribological properties of the DLC film,which may be attributed to the transformation of the film structure due to the dopi

关 键 词：磁控溅射 DLC复合薄膜 元素掺杂 高温 摩擦磨损 

分 类 号：TH117.2[机械工程—机械设计及理论]