化学气相沉积制备碳化硅涂层的彩色现象原因浅析  

Analysis of the Reasons for Color Phenomenon of Silicon Carbide Coatings Prepared by Chemical Vapor Deposition

作　　者：李江涛 孙佳庆 魏庆渤 张东生 马美霞 LI Jiang-tao;SUN Jia-qing;WEI Qing-bo;ZHANG Dong-sheng;MA Mei-xia(Gongyi Van Yihui Composites Material Co.,Ltd.,Gongyi 451200,China;School of Materials Science and Engineering,Zhengzhou University,Zhengzhou 450001,China)

机构地区：[1]巩义市泛锐熠辉复合材料有限公司,河南巩义451200 [2]郑州大学材料科学与工程学院,河南郑州450001

出　　处：《材料保护》2023年第2期179-182,共4页Materials Protection

摘　　要：针对化学气相沉积(CVD)法制备碳化硅(SiC)涂层在工程应用中出现的彩色现象,采用扫描电镜(SEM)、能谱(EDS)、X射线衍射仪(XRD)等分析测试方法,研究了不同空气流量对CVD-SiC涂层表面形貌和组织结构的影响。结果表明:空气中的O_(2)参与反应生成SiO_(2)相是涂层表面出现彩色现象的主要原因;涂层中SiO_(2)含量及涂层厚度的不同使涂层表面呈现彩色时颜色各异;随着空气流量增大,涂层表面SEM形貌由“砂砾状”演变为“菜花状”,最后呈现为“棒状”,导致涂层致密性下降。In view of the color phenomenon of silicon carbide(SiC)coatings prepared by chemical vapor deposition(CVD)in engineering applications,the effects of different air flow rates on the surface morphology and microstructure of CVD-SiC coatings were studied by the means of scanning electron microscopy(SEM),energy spectroscopy(EDS)and X-ray diffractometer(XRD).Results showed that the O_(2)in the air participated in the reaction to form SiO_(2)phase,which was the main reason for the color phenomenon on the surface of the coatings;the differences in SiO_(2)content and coating thickness made the coating color different;with the increase of air flow,the microscopic morphologies of the coating changed from“gravel-like”to“cauliflower-like”,and they were“rod-like”finally,which caused a decrease in the compactness of the coating.

关 键 词：化学气相沉积 SIC涂层 彩色现象 表面形貌 组织结构 

分 类 号：TB332[一般工业技术—材料科学与工程]