一种振动测量用电容式硅基MEMS加速度计  

Capacitive Silicon-Based MEMS Accelerometer for Vibration Measurement

作　　者：王宁 杨拥军[1] 任臣[1] 温彦志 Wang Ning;Yang Yongjun;Ren Chen;Wen Yanzhi(The 13^(th)Research Institute,CETC,Shijiazhuang 050051,China;MT Microsystems Co.,Ltd.,Shijiazhuang 050299,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]河北美泰电子科技有限公司,石家庄050299

出　　处：《微纳电子技术》2023年第1期108-115,共8页Micronanoelectronic Technology

摘　　要：为了解决目前微电子机械系统(MEMS)加速度计在振动测量领域量程小和振动测量精度低等问题,基于绝缘体上硅(SOI)加工工艺,设计并制作了一款梳齿电容式MEMS加速度计。通过提高工作模态频率和干扰模态频差,提升了加速度计振动环境适应性;加速度计量程达到±50g,非线性度0.2%,横向灵敏度0.17%,分辨率优于0.5mg,体积9 mm×9 mm×2.7 mm,功率损耗30 mW。针对随机振动环境对加速度计的输出精度进行了实验验证,结果表明,MEMS加速度计与标准传感器的输出误差为2.69%,能够满足大部分工程应用需求。To solve the problems of insufficient measurement range and low accuracy for the micro-electromechanical system(MEMS) accelerometer in the field of vibration measurement, a comb capacitive MEMS accelerometer was designed and fabricated based on the silicon-on-insulator(SOI) processing technology. By increasing the working mode frequency and the frequency difference of interference mode, the vibration environment adaptability of the accelerometer is improved. The measurement range of the accelerometer reaches ±50g, nonlinearity reaches 0.2%, transverse sensitivity reaches 0.17%, resolution is better than 0.5mg, volume is 9 mm×9 mm×2.7 mm, and power consumption is 30 mW. The output accuracy of the accelerometer was verified by experiments in random vibration environment. The results show that the output error between the MEMS accelerometer and standard sensor is 2.69%, which can meet the requirements of most engineering applications.

关 键 词：微电子机械系统(MEMS) 加速度计 绝缘体上硅(SOI) 振动测量 高精度 

分 类 号：TH824.4[机械工程—仪器科学与技术] TH703[机械工程—精密仪器及机械]