谐振微悬臂梁传感器的工作原理及其在生化检测中的研究进展  

Principle of resonant micro-cantilever sensor and its research progress in biochemical detection

作　　者：田宽 闫堉琦 孙雨安 廉中义 陈滢[2] 许鹏程[2] Tian Kuan;Yan Yuqi;Sun Yuan;Lian Zhongyi;Chen Ying;Xu Pengcheng(School of Materials and Chemical Engineering,Zhengzhou University of Light Industry,Zhengzhou 450002,China;State Key Lab of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academyof Sciences,Shanghai 200050,China)

机构地区：[1]郑州轻工业大学材料与化学工程学院,河南郑州450002 [2]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《电子技术应用》2023年第3期11-20,共10页Application of Electronic Technique

基　　金：国家重点研发计划(2020YFB2008603);国家自然科学基金(61974155)。

摘　　要：谐振微悬臂梁是一种可以将质量变化转换为频率信号的微质量型传感器,因其分辨率高、灵敏度高、成本低、易于集成和小型化等优点而备受关注。谐振微悬臂梁现已被广泛应用于流量控制、生物医学痕量检测、气态和液态分子分析等领域。近年来,随着微机电系统(Micro-Electro-Mechanical System,MEMS)技术的快速发展,针对谐振式微悬臂梁传感器的研究与应用越来越多,对近年来谐振式微悬臂梁传感器在环境检测、生物医学等领域的具体应用进行了综述,并对未来的发展方向做出了展望。Resonant microcantilever is a mass-type sensor that transforms mass change into frequency-shift signals. Due to the advantages of high mass resolution, high sensitivity, low cost, easy integration and miniaturization, resonant microcantilevers have received extensive attention from researchers. In recent years, with the rapid development of MEMS(Micro-ElectroMechanical Systems) technology, resonant micro-cantilever sensors have been widely used in mass and flow control, trace biomedical detection, gas or liquid molecular analysis and other broad application fields. Herein, the specific applications of resonant microcantilever sensors in environmental detection, biomedicine and other fields in recent years are reviewed, and the future development trends are prospected.

关 键 词：谐振式传感器 微悬臂梁 微机电系统 谐振频率 环境监测 生物医学 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]