TOPCon电池低压硼扩散设备的发展趋势分析  

The Development Trend Analysis of TOPCon Battery Low Boron Diffusion Equipment

作　　者：刘建华 龙辉 李程 梁浩 李楠 LIU Jianhua;LONG Hui;LI Cheng;LIANG Hao;LI Nan(Hunan Red Sun New Energy Technology Co.,Ltd.,Changsha 410000,China;Hunan Red Sun Optoelectronic Technology Co.,Ltd.,Changsha 410000,China;The 48^(th) Research Institute of CETC,Changsha 410000,China)

机构地区：[1]湖南红太阳新能源科技有限公司,湖南长沙410000 [2]湖南红太阳光电科技有限公司,湖南长沙410000 [3]中国电子科技集团第四十八研究所,湖南长沙410000

出　　处：《电子工业专用设备》2023年第1期1-6,59,共7页Equipment for Electronic Products Manufacturing

摘　　要：随着太阳能光伏发电对晶体硅电池高转化效率需求的不断增加,对晶体硅电池技术关键设备投资性价比和发电性能的要求更高。对晶硅电池发展工艺技术进行了阐述,分析讨论了国内外隧穿氧化层钝化接触电池(简称“TOPCon”)低压硼扩散炉的发展现状,探讨了硼扩散设备技术难点和未来研究方向。With the increasing demand for high conversion efficiency of crystalline silicon cells in solar photovoltaic power generation,the development process technology of crystalline silicon cells is elaborated on the higher requirements for the investment cost performance and power generation performance of key equipment of crystalline silicon cell technology. The development status of low-voltage boron diffusion furnace for tunneled oxide passivation contact battery(abbreviated to“TOPCon”) at home and abroad is analyzed and discussed. The technical difficulties and future research directions of boron diffusion equipment are discussed.

关 键 词：太阳能 光伏发电 隧穿氧化层钝化接触电池 高转化效率 硼扩散 

分 类 号：TN305.4[电子电信—物理电子学]