半导体设备运动轨迹规划及平滑停止算法  

Motion Trajectory Planning and Smooth Stop Algorithm for Semiconductor Equipment

作　　者：步石 陈国兴 赵立华[1] 陈沿宇 杨际腾 BU Shi;CHEN Guoxing;ZHAO Lihua;CHEN Yanyu;YANG Jiteng(The 45^(th) Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第1期34-39,共6页Equipment for Electronic Products Manufacturing

摘　　要：为满足半导体精密设备步进速度和精度的控制要求,步进运动轨迹应具备精度高、冲击小、速度快等特征。根据其运动轨迹特征,设计出四阶S型运动轨迹规划算法,但在实际应用中,一种轨迹规划通常并不能完全覆盖所有的使用场景。为实现能够根据实际需求提前停止的运动轨迹,在四阶运动轨迹基础上,通过使用轨迹拼接的方式设计出平滑停止算法。根据测试结果,四阶运动轨迹可以根据外部触发信号在任意时刻转为平滑停止轨迹,达到快速停止的目的,且轨迹不会产生额外的冲击力,确保了四阶运动轨迹原有的特征。In order to satisfy the demand for fast and accurate control of semiconductor equipment stepping motion control,the trajectory should have the characteristics of high precision,low impact,fast motion speed,and so on. Usually,a trajectory planning algorithm in actual use cannot cover all application completely. In order to realize the motion trajectory that can be stopped in advance according to the actual demand,a smooth stop algorithm is designed based on the fourth-order motion trajectory by using the trajectory link-up method. According to the test results,the fourth-order motion trajectory can be turned into a smooth stop trajectory at any time according to the external trigger signal to achieve the purpose of quick stop,and the trajectory will not produce additional impact force,ensuring the original characteristics of the fourth-order motion trajectory.

关 键 词：运动控制 轨迹规划 平滑停止 精密运动 

分 类 号：TN305[电子电信—物理电子学]