基于纳秒激光诱导等离子体辅助烧蚀的玻璃表面金属化实验研究  

Experiment study on glass surface metallization based on nanosecond laser-induced plasma-assisted ablation

作　　者：姜长城[1] 何林 姜志康[1,2] 冯万欣 林新贵 易根苗[3] 梁良[1,2] JIANG Changcheng;HE Lin;JIANG Zhikang;FENG Wanxin;LIN Xingui;YI Genmiao;LIANG Liang(School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510641,China;National Engineering Research Center of Near-net-shape Forming for Metallic Materials,South China University of Technology,Guangzhou 510641,China;School of Intelligent Manufacturing,Guangzhou Panyu Polytechnic,Guangzhou 511483,China)

机构地区：[1]华南理工大学机械与汽车工程学院,广东广州510641 [2]华南理工大学国家金属材料近净成形工程技术研究中心,广东广州510641 [3]广州番禺职业技术学院智能制造学院,广东广州511483

出　　处：《实验技术与管理》2023年第2期14-19,47,共7页Experimental Technology and Management

基　　金：广州市教育局创新团队科研项目(202032764);广州市科技计划项目(202102080424);广州市高校创新创业(就业)教育资助项目(2020KC002);华南理工大学本科教研教改资助项目(Y1190251)。

摘　　要：由于激光诱导等离子体辅助烧蚀(LIPAA)在玻璃表面金属化加工中具有经济、环境友好且高效的特点,该文研究了在纳秒激光下以金属铜作为牺牲靶材,于玻璃基板上采用LIPAA工艺实现直接平面金属化的可行性。为此,对逐行扫描LIPAA制备的玻璃基板上平面金属层的形态和化学成分进行了详细表征;进一步,结合扫描电子显微镜及X射线能谱分析仪对试件在不同激光扫描速度、线间距、激光功率及频率下金属化的表面形貌演变进行了深入分析,揭示了以上加工参数对玻璃表面金属化覆盖率及形貌的影响规律。实验结果表明,当激光功率为20 W,激光频率为20 kHz,激光扫描线间距为2.5μm,扫描速度为300 mm/s时,玻璃表面的金属化可实现全区域覆盖且厚度适中。Due to the economical,environment-friendly and efficient characteristics of laser-induced plasmaassisted ablation(LIPAA)in glass surface metallization,the feasibility of LIPAA process for direct planar metallization is studied by use of metallic copper as a sacrificial target on a glass substrate under nanosecond laser.First,the morphology and chemical composition of the planar metal layer on the glass substrate prepared by progressive scan LIPAA are characterized in detail.Further,combined with scanning electron microscope and X-ray energy spectrum analyzer,the evolution of the surface morphology of the metallization of the specimen under different laser scanning speed,line spacing,laser power and frequency is deeply analyzed,and it is revealed that the above processing parameters have an impact on the metallization coverage and morphology of the glass surface.The experimental results show that when the laser power is 20 W,the laser frequency is 20 kHz,the laser scanning line spacing is 2.5μm,and the scanning speed is 300 mm/s,the metallization on the glass surface can achieve full-area coverage and moderate thickness.

关 键 词：激光诱导等离子体辅助烧蚀 表面金属化 纳秒激光 玻璃 

分 类 号：TG146[一般工业技术—材料科学与工程]