基体偏压对316L不锈钢表面多层Ti-DLC薄膜摩擦及腐蚀行为的影响  

Effects of Substrate Bias Voltage on Friction and Corrosion Behavior of Multilayer Ti-DLC Film on the Surface of 316L Stainless Steel

作　　者：李超 马国佳 孙刚 张博威 刘星 张昊泽 吴俊升 LI Chao;MA Guojia;SUN Gang;ZHANG Bowei;LIU Xing;ZHANG Haoze;WU Junsheng l(Institute of Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China;Science and Technology on Power Beam Processes Laboratory,AVIC Manufacturing Technology Institute,Beijing 100024,China;Aeronautical Key Laboratory for Advanced Surface Engineering Technology,AVIC Manufacturing Technology Institute,Beijing 100024,China)

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]中国航空制造技术研究院高能束流加工技术重点实验室,北京100024 [3]中国航空制造技术研究院先进表面工程技术航空重点实验室,北京100024

出　　处：《中国表面工程》2023年第1期189-199,共11页China Surface Engineering

基　　金：国家自然科学基金(51771027);北京市自然科学基金(2212037);国家科技基础资源调查专项(2019FY101400)资助项目。

摘　　要：在严苛海洋环境下,传统单一的Ti掺杂类金刚石薄膜(DLC)无法满足减摩耐磨及耐腐蚀性能的要求,仍须进一步探索.为促进DLC薄膜在严苛海洋环境下的应用,采用中频磁控溅射技术在316L不锈钢上制备Ti/TiN/TiCN/Ti-DLC复合薄膜.通过SEM、拉曼光谱、XPS、纳米压痕测试、摩擦磨损试验及电化学测试等方法,重点研究基体偏压对薄膜结构、力学性能、摩擦性能及耐腐蚀性能的影响规律.结果显示:随着基体偏压从-60 V到-120 V,薄膜中sp3-C/sp2-C比值逐渐增大,薄膜硬度及弹性模量逐渐增大;薄膜结合力呈现先增大后减小的趋势,在-80 V时达到最大24.5 N;在7N的法向载荷下,薄膜磨损失效时间先增大后减小,偏压为-80 V时磨损寿命最长;316L不锈钢和所有薄膜的阳极极化曲线都表现出明显的钝化现象,在偏压为-120 V时,薄膜的维钝电流密度比316L不锈钢低两个数量级,表现出优异的耐蚀性;薄膜电阻Rf和电荷转移电阻Rct逐渐增大,薄膜的耐腐蚀性能逐渐增强.Ti/TiN/TiCN/Ti-DLC复合薄膜的多层结构和元素掺杂相结合的设计有效提高了316L不锈钢的耐腐蚀性能和减摩耐磨性能,拓宽了类金刚石薄膜在严苛海洋服役环境下的应用范围.Diamond-like carbon(DLC)films are widely used in the fields of aerospace,metal processing,and marine protection because of their high hardness and excellent wear and corrosion resistance properties.Among them,Ti-doped DLC films have a wide range of applications in the field of surface protection.However,conventional single Ti-doped DLC films are unable to meet the wear and corrosion resistance requirements of harsh marine environments.Thus,the preparation process must be further explored.To promote the application of DLC films in harsh marine environments,Ti/TiN/TiCN/Ti-DLC composite films were prepared on 316 L stainless steel using the medium-frequency magnetron sputtering technique.Scanning electron microscopy(SEM)and energy-dispersive X-ray spectroscopy(EDS)were applied to analyze the microscopic morphology,corrosion morphology,and elemental content of the films.The bonding state and chemical composition of the films were analyzed by X-ray photoelectron spectroscopy(XPS).The hardness,tribological behavior,and corrosion resistance of the films were evaluated by a nanoindentation tester,friction and wear tester,and electrochemical testing.The experimental variables are the negative bias voltages of the matrix(-60 V,-80 V,-100 V,and-120 V).The influence of the substrate bias on the structure,mechanical properties,friction properties,and corrosion resistance of the films is highlighted.The results show that the Ti element in the Ti-DLC section mainly exists in the form of TiO2,TiC,and TiCN.The overall thickness of the films deposited at the four different bias voltages is approximately 2μm.The thickness of the Ti-DLC section is stabilized in this range of 0.82±0.03μm,which indicates that changes in the substrate bias voltage have lttle influence on the growth rate of the films.The atomic fraction of the Ti element in the surface layer of allfilms is approximately 5%,indicating that the change in the substrate bias voltage has little effect on the chemical composition of the film surface.As the substrate bias v

关 键 词：基体偏压 中频磁控溅射 类金刚石蒲膜(DLC) 摩擦磨损性能 腐蚀 

分 类 号：TG174[金属学及工艺—金属表面处理] TG178[金属学及工艺—金属学]