基于微机电系统(MEMS)的磁通门传感器研究进展  

Research progress of fluxgate sensors based on MEMS

作　　者：许薇 邹旭东 张志红 彭根斋 陈嘉民 XU Wei;ZOU Xu-dong;ZHANG Zhi-hong;PENG Gen-zhai;CHEN Jia-min(State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100094,China;School of Microelectronics,University of Science and Technology of China,Hefei 230026,China;Southwest Institute of Applied Magnetics,Mianyang 621000,China)

机构地区：[1]中国科学院空天信息创新研究院传感技术国家重点实验室,北京100094 [2]中国科学技术大学微电子学院,安徽合肥230026 [3]西南应用磁学研究所,四川绵阳621000

出　　处：《磁性材料及器件》2023年第2期95-101,共7页Journal of Magnetic Materials and Devices

基　　金：国家重点研发计划青年科学家项目(2021YFB2011600);国家自然科学基金青年科学基金项目(61901440);北京市自然科学基金面上项目(4202080);国防基础科研计划项目(SK2020-013-2);中国科学院率先行动“百人计划”项目;中国科学技术协会青年人才托举工程项目(2021QNRC001)。

摘　　要：磁通门传感器是由电磁感应效应衍生出来的一类主动式感应变压器,能够感应到外界微弱的直流或低频磁场,因为它在噪声、温度稳定性、磁场分辨率和灵敏度方面的优势,被广泛应用在了定位跟踪、航空航天、地磁探测和电流检测等领域。但现在,各类设备都朝着小型化发展,对磁通门质量、体积、功耗、集成度有了更高的要求,所以磁通门传感器的微型化研究十分必要。微机电(Micro-electro-mechanical System,MEMS)加工为此提供了技术基础。简要分析了磁通门传感器的基本原理,阐述了微型磁通门传感器工艺技术的发展历史,包括微加工技术、PCB技术和MEMS技术。重点总结了MEMS磁通门结构工艺的发展历程以及MEMS正交磁通门发展状况。介绍了MEMS磁通门在相应场合的应用优势与发展状况,并展望了此领域未来的研究重点。As a kind of active induction transformer derived from electromagnetic induction effect fluxgate sensor can be used to sense weak DC or low-frequency magnetic fields.Because of its advantages in noise,temperature stability,magnetic field resolution and sensitivity,it has been widely used in the field of location tracking,aerospace,geomagnetic detection and current detection.But nowadays,all kinds of equipments comply with the trend of miniaturization,which requires the fluxgate sensor to show higher performance in quality,volume,power consumption and integration,so it is very necessary to study the miniaturization of fluxgate sensors.Micro-electro-mechanical System(MEMS) machining provides the technical basis for this.This paper briefly introduces the basic concept of fluxgate sensor,expounds the development history of MEMS fluxgate sensor manufacturing technology,including microfabrication process,PCB process,MEMS process.The development of MEMS fluxgate structure and MEMS orthogonal fluxgate are described.The application advantages and development status of MEMS fluxgate are introduced,and the future research emphases in this field are forecasted.

关 键 词：磁通门传感器 MEMS 磁测量 应用 

分 类 号：TH-39[机械工程] TP212[自动化与计算机技术—检测技术与自动化装置]