多层微纳薄膜的高精度检测技术进展  

Review of high precision measurements of multilayer micro-nano films

作　　者：祝源浩 董佳琦 宋有建[1] 胡明列[1] ZHU Yuanhao;DONG Jiaqi;SONG Youjian;HU Minglie(Key Laboratory of Opto-electronic Information Science and Technology of Ministry of Education,School of Precision Instruments and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密仪器与光电子工程学院光电信息技术教育部重点实验室,天津300072

出　　处：《计测技术》2023年第1期58-69,共12页Metrology & Measurement Technology

基　　金：广东省重点领域研发计划项目(2018B090944001)。

摘　　要：在半导体、机械加工等行业中广泛应用的多层微纳薄膜通常是由数个纳米厚度的单层膜叠加形成的,在其制造过程中,由于工艺条件所限,薄膜厚度的均匀性会出现误差,进而影响其性能。因此薄膜厚度的准确测量至关重要,亟需一种无损、高精度、快速的检测技术对薄膜的厚度及其均匀性进行测量、检测。回顾近年来多层膜在不同领域的应用现状,分析了目前应用于多层膜厚度测量的技术(如X射线衍射等)及其不足,以及椭圆偏振法技术的研究进展,最后介绍了机器学习在厚度测量中的应用,并对未来机器学习与测量结合的前景进行了展望。Multilayer micro nano films widely used in semiconductor, mechanical processing and other industries are usually formed by superposition of several single-layer films with nanometer thickness. Due to the limitations of process conditions in the manufacturing process, the film thickness may have uniformity errors, which will affect the performance of the films. Therefore, the accurate measurement of the film thickness is very important, and a nondestructive, high-precision and fast detection technology is urgently needed to measure and detect the thickness and uniformity of the film. This paper reviews the application status of multilayer films in different fields in recent years, analyzes the current technologies of multilayer thickness measurement, such as X-ray diffraction, and their shortcomings, and also reviews the research progress of ellipsometry. Finally, the application of machine learning in thickness measurement is introduced, and the prospect of the combination of machine learning and measurement in the future is discussed.

关 键 词：多层薄膜 薄膜测量 椭偏仪 机器学习 

分 类 号：TB96[机械工程—光学工程]