双差动快速结构光显微测量方法和系统  

Double-differential fast structured illumination microscopy measurement method and system

作　　者：唐燕[1] 韩陈浩磊 冯金花[1] 全海洋[1] 王建[1] 胡松[1] TANG Yan;HAN Chenhaolei;FENG Jinhua;QUAN Haiyang;WANG Jian;HU Song(State Key Laboratory of Optical Technologies for Micro-Fabrication,Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川成都610209 [2]中国科学院大学,北京100049

出　　处：《计测技术》2023年第1期112-121,共10页Metrology & Measurement Technology

基　　金：国家自然基金(61875201,61975211,62005287,61604154);四川省杰出青年科技基金(2020JDJQ0005);四川省中央引导地方发展计划(2020ZYD020);四川省地方创新合作合作计划(2022YFQ0007);四川省科技项目(2018JY0203)。

摘　　要：快速结构光显微测量技术具有高精度、高效率以及强适应性等特点,广泛应用于微纳检测领域。传统的快速结构光显微测量方法,利用轴向调制度响应曲线的线性区域,通过构建调制度值与实际高度之间的关系来实现三维形貌重建。但是,轴向调制度响应曲线的线性区域很短,传统方法的应用受限于其较窄的动态测量范围。为了克服这一缺陷,提出了一种双差动快速结构光显微测量技术。通过引入两条额外的探测支路构建双差动轴向调制度响应曲线,可以获得更宽的线性区域。在数值孔径为0.9,放大倍率为100倍的显微物镜条件下,其测量范围在仿真分析中可从380 nm提升到760 nm,在实验中可从300 nm提升到600 nm。仿真与实验结果均证明双差动快速结构光显微测量方法的动态测量范围相比传统方法的动态测量范围提升了一倍,有效地拓展了快速结构光显微测量技术的应用范围。Fast structured illumination microscopy plays an important role in micro-nano detection due to the characteristics of high accuracy,high efficiency and strong adaptability.Traditional methods utilizes the linear region of the axial modulation response curve to achieve 3D topography recovery by building the relationship between the modulation and the actual height.However,the appli⁃cation of traditional methods is limited to its narrow dynamic measurement range since the linear region of axial modulation response curve is very short.In order to overcome the disadvantage,a double-differential fast structured illumination microscopy is proposed.By introducing two additional detection branches for building the double-differential axial modulation response curve to obtain a wider lin⁃ear region,the proposed method can obtain a larger dynamic measurement range.Under the condition of a microscope objective with a numerical aperture of 0.9 and a magnification of 100,the dynamic measurement range is expanded from 380 nm to 760 nm in simula⁃tion and from 300 nm to 600 nm in actual experiment.The simulations and experimental results verify that the dynamic measurement range of double-differential fast structured illumination microscopy is twice as large as that of the traditional method under the same system parameters,which effectively broadens the application range of fast structured illumination microscopy.

关 键 词：检测 三维形貌恢复 快速结构光显微测量 双差动检测 微纳检测 

分 类 号：TB96[机械工程—光学工程]