自动和半自动探针台的载片台水平位移测量方法研究  

Research on Measuring Method of Horizontal Displacement of the Chuck for Automatic and Semi⁃automatic Probe Platform

作　　者：霍晔 吴爱华[1] 王一帮[1] 栾鹏[1] 刘晨[1] 梁法国[1] 杜静 HUO Ye;WU Ai-hua;WANG Yi-bang;LUAN Peng;LIU Chen;LIANG Fa-guo;DU Jing(The 13th Research Institute of China Electronics Technology Group Corporation,Shijiazhuang 050051,China;Shijiazhuang Division of PLA Infantry Academy,Shijiazhuang 050083,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]解放军陆军步兵学院石家庄校区,石家庄050083

出　　处：《宇航计测技术》2023年第1期30-33,75,共5页Journal of Astronautic Metrology and Measurement

摘　　要：为解决自动和半自动探针台的载片台水平方向位移发生偏差时,导致探针压点位置不准,从而使测试结果不可靠,甚至伤及芯片和探针的问题。根据实际工艺和溯源机构的标准器具特性,设计了标准尺的图形,在苏打玻璃上电镀5μm宽的金线条,制作成152.4mm×20mm的长方形标准尺,其测量范围为(0~150)mm。对标准尺进行了定标,定标不确定度为1.0μm。在测量范围内,进行了试验分析,评定了测量不确定度。结果表明:标准尺测量的水平位移偏差小于4μm,满足测试需求。In order to solve the problem that the pressure point of the probe is not accurate when the horizontal displacement of the chuck of the automatic and semi⁃automatic probe platform is deviated,which leads to the unreliable test results and even hurts the chip and probe.According to the actual process and the traceability mechanism of the standard instrument,the drawing of standard ruler was designed,electroplated 5μm wide gold lines on soda glass,and made into 152.4 mm×20 mm rectangular standard ruler,its measurement range of(0~150)mm.The standard ruler was calibrated whit an uncertainty of 1μm.In the measurement range,the experimental analysis is carried out and the measurement uncertainty is evaluated.The results show that the deviation of horizontal displacement measured by standard ruler is less than 4μm,which meets the testing requirements.

关 键 词：自动 探针台 位移 标准尺 不确定度 

分 类 号：TB973[一般工业技术—计量学]