压电式触觉传感器的优化与应用的研究进展  

Research Progress in Optimization and Application of Piezoelectric Tactile Sensors

作　　者：王俊博 高国伟[1,2] Wang Junbo;Gao Guowei(Key Laboratory of Sensors,University of Information Technology Beijing,Beijing 100101,China;Key Laboratory of Modern Measurement and Control Technology of Ministry of Education,Universityof Information Technology Beijing,Beijing 100192,China)

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101 [2]北京信息科技大学现代测控技术教育部重点实验室,北京100192

出　　处：《微纳电子技术》2023年第2期165-174,共10页Micronanoelectronic Technology

基　　金：国家自然科学基金联合基金重点项目(U20A20167);国家自然科学基金项目(62071054)。

摘　　要：对有机、无机压电材料在压电性能和机械性能上的优劣进行了简单阐述。对压电材料的改进与制备工艺进行了评述,包括掺杂钛酸钡纳米粒子的聚偏二氟乙烯纤维的制备方法、含不同体积分数锆钛酸铅的聚二甲基硅氧烷复合薄膜的制备方法、可3D打印不进行极化具备一定压电性能的压电传感器系统、通过长丝挤压技术制备液晶聚合物-锆钛酸铅复合材料的制备方法。阐述了通过改进结构和使用复合材料的方式提升压电式触觉传感器性能的发展现状,以及压电触觉传感器在医疗诊断、电子皮肤、人工智能、三维力监测方向上的实际应用,最后对压电式触觉传感器的发展进行了总结与展望。The advantages and disadvantages of organic and inorganic piezoelectric materials are briefly explained in terms of piezoelectric performances and mechanical performances.The improvement and preparation process of piezoelectric materials are reviewed,including the preparation method of polyvinylidene difluoride fiber doped with barium titanate nanoparticles,the preparation method of polydimethylsiloxane composite films with different volume fractions of lead zirconate titanate,the piezoelectric sensor system with certain piezoelectric properties that can be 3D printed without polarization,the preparation method of liquid crystal polymer-lead zirconate titanate composites by filament extrusion technology.The development status of perfor-mance improvement of the piezoelectric tactile sensor by improving the structure and using the composite materials is elaborated,and the actual applications in the directions of medical diagnosis,electronic skin,artificial intelligence and three-dimensional force monitoring are also represented.Finally,the developments of the piezoelectric tactile sensors are summarized and prospected.

关 键 词：压电材料 触觉传感器 柔性 压电效应 锆钛酸铅 聚偏二氟乙烯 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN384[自动化与计算机技术—控制科学与工程]