脉冲激光诱导光学薄膜元件损伤识别方法综述  

Survey of Damage Identification Methods for Optical Film Elements Induced by Pulsed Lasers

作　　者：苏俊宏 徐均琪 汪桂霞 李建超 SU Jun-hong;XU Jun-qi;WANG Gui-xia;LI Jian-chao(School of Optoelectronic Engineering,Xi’an Technological University,Xi’an 710021,China)

机构地区：[1]西安工业大学光电工程学院,陕西省光电测试与仪器技术重点实验室,陕西西安710021

出　　处：《光学与光电技术》2023年第1期1-12,共12页Optics & Optoelectronic Technology

基　　金：国家自然科学基金(60978040、61205155、61378050、62205263)资助项目。

摘　　要：随着激光技术的不断发展,对应用于大功率、高能量激光系统,以及激光防护系统中的光学薄膜器件提出了高损伤阈值的要求。但目前在激光损伤阈值的测量上,还存在测量标准不统一、重复性不好、准确性差、相互结果难以比对等问题,其主要原因在于不同的材料及膜系适用于不同的损伤识别方法。对目前国内外在损伤识别方法方面的研究进行了总结,阐述了图像法、散射法、等离子闪光法,等离子体光谱法等多种不同的损伤识别方法,介绍了各种方法识别损伤的原理、特点,以及损伤识别的效果,期望对激光损伤阈值测试方面的研究具有参考和借鉴。With the development of laser technology,high laser-induced damage threshold(LIDT)is required for optical thin film devices used in high power and high energy laser systems and laser protection systems.However,at present,there are still some problems in the measurement of LIDT,such as inconsistent measurement standards,poor repeatability,poor accuracy,and difficult comparison of mutual results.The main reason is that different measurement materials and film stacks are suitable for different damage discrimination methods.In this paper,the research on damage identification method are summarized,and the image method,scattering method,plasma flash method,plasma spectrometry and so on a variety of different damage identification method are presented,the principle and characteristics of various methods,as well as the effect of damage criterion,the research on laser damage threshold test work are described in this paper.It is expected to be a reference for the research work of LIDT test.

关 键 词：激光损伤阈值 识别方法 薄膜 等离子体光谱法 声学法 质谱法 

分 类 号：O484[理学—固体物理]