基于扩展标量衍射理论的衍射光学元件设计  

Design of Diffractive Optical Element Based on Extended Scalar Diffraction Theory

作　　者：杨亮亮[1] 沈法华[1] 赵琪 刘建利 赵勇兵 YANG Liangliang;SHEN Fahua;ZHAO Qi;LIU Jianli;ZHAO Yongbing(Jiangsu Province Intelligent Optoelectronic Devices and Measurement Control Engineering Research Center,School of Physics and Electronics Engineering,Yancheng Teachers University,Yancheng Jiangsu224007,CHN)

机构地区：[1]盐城师范学院物理与电子工程学院江苏省智能光电器件与测控工程研究中心,盐城江苏224007

出　　处：《光电子技术》2023年第1期62-66,共5页Optoelectronic Technology

基　　金：国家自然科学基金(61904158);江苏省智能光电器件与测控工程研究中心开放基金(306054014);江苏省重点研发计划—社会发展项目(BE2021685);江苏省高校自然科学研究项目(19KJD140005)。

摘　　要：基于扩展标量衍射理论,建立了衍射光学元件的微结构高度与周期宽度和入射角度的理论关系模型,提出了不同入射角度时,利用带宽积分平均衍射效率最大化实现设计波长和微结构高度等结构参数的优化设计方法。以工作在近红外波段的衍射光学元件为例进行分析。结果表明:周期宽度一定时,入射角度的改变会引起基于带宽积分平均衍射效率最大化所确定的结构参数发生变化。该设计方法和结论可以用于指导衍射光学元件的设计。Based on the extended scalar diffraction theory(ESDT), the theoretical model of the relationship between the microstructure height, the period width and the incidence angle of diffractive optical element(DOE)was established. The optimal design method of the structure parameters, such as design wavelength and microstructure height, was proposed based on the maximization of the bandwidth integral average diffraction efficiency(BIADE) at different incident angles. A DOE working within the near infrared waveband was taken as an example. Results indicated that when the period width was determined, the change of incident angle could cause the change of structure parameters obtained based on the maximization of BIADE. The designed method and conclusions could be used to guide the design of DOE.

关 键 词：衍射光学 入射角度 衍射效率 微结构高度 

分 类 号：TN29[电子电信—物理电子学] O436[机械工程—光学工程]