基体偏压对H13钢表面镀TiAlCrN薄膜结构和性能的影响  

Effect of substrate bias on structure and properties of TiAlCrN thin films deposited on H13 steel

作　　者：覃群 付泽钰 王天国 Qin Qun;Fu Zeyu;Wang Tianguo(School of Materials Science and Engineering,Hubei University of Automotive Technology,Shiyan 442002,China)

机构地区：[1]湖北汽车工业学院材料科学与工程学院,湖北十堰442002

出　　处：《电镀与精饰》2023年第4期19-25,共7页Plating & Finishing

基　　金：湖北省教育厅科学技术项目(Q20181802);湖北省高等学校优秀中青年科技创新团队计划项目(T201811)。

摘　　要：为了提高H13模具钢的表面性能和使用寿命,采用多弧离子镀技术在H13模具钢表面制备TiAlCrN薄膜,研究了基体偏压对H13钢表面镀TiAlCrN薄膜结构和性能的影响。结果表明:不同偏压下制备的TiAlCrN涂层表面都有不同大小的颗粒,在偏压为100 V时,大颗粒数量最少且均匀细小,涂层表面质量较好。随着偏压增大,制备涂层的TiAlCrN(200)、TiAlCrN(220)衍射峰峰强减弱,TiAlCrN(111)面择优取向变强。随着偏压的增加,TiAlCrN涂层的硬度、结合力都呈先增大后减小趋势。在偏压为100 V时,有最大硬度值2650.5 HV,最大膜基结合力26 N。随着偏压增加,TiAlCrN涂层试样氧化增重率先减少再增加。在偏压为100 V时,氧化增重率最低,在此工艺参数下制备的TiAlCrN涂层高温抗氧化性能最佳。在偏压为100 V时,制备的TiAlCrN涂层有最小的腐蚀电流密度,耐腐蚀性能最佳。In order to improve the surface properties and service life of H13 die steel,TiAlCrN film was prepared on H13 die steel by multi-arc ion plating technology.The effect of substrate bias on the structure and properties of TiAlCrN film deposited on H13 steel was studied.The results show that the TiAlCrN coating prepared under different bias pressures has particles of different sizes on the surface.When the bias voltage is 100 V,the number of large particles is the least,and the coating surface quality is good.With the increase of bias voltage,the diffraction peak intensity of TiAlCrN(200)and TiAlCrN(220)of the prepared coating decreases,and the preferred orientation of TiAlCrN(111)plane becomes stronger.With the increase of bias voltage,the hardness and adhesion of TiAlCrN coating first increase and then decrease.When the bias voltage is 100 V,the maximum hardness value is 2650.5 HV,and the maximum film-based adhesion force is 26 N.With the increase of bias voltage,the oxidation mass gain rate of TiAlCrN coating samples decreases first and then increases.When the bias voltage is 100 V,the oxidation mass gain rate is the lowest.The TiAlCrN coating prepared under this process parameter has the best oxidation resistance at high temperature.When the bias voltage is 100 V, the prepared TiAlCrN coating has the lowest corrosion current density and the best corrosion re‐sistance.

关 键 词：TiAlCrN薄膜 多弧离子镀 偏压 氧化 耐蚀性 

分 类 号：TG156.88[金属学及工艺—热处理]