基于GaAs pHEMT工艺的宽带6位数字移相器MMIC  

A wideband 6 bit digital phase shifter MMIC based on GaAs pHEMT process

作　　者：周守利[1] 顾磊 张景乐 吴建敏 Zhou Shouli;Gu Lei;Zhang Jingle;Wu Jianmin(College of Information Engineering,Zhejiang University of Technology,Hangzhou,310023,China;Hangzhou Xiaoshan Technician College,Hangzhou,311201,China)

机构地区：[1]浙江工业大学信息工程学院,杭州310023 [2]杭州萧山技师学院,杭州311201

出　　处：《南京大学学报（自然科学版）》2023年第1期183-188,共6页Journal of Nanjing University（Natural Science）

基　　金：中国科学院空间科学战略性科技先导专项基金(XDA04060300);中国博士后科学基金(2013M540147)。

摘　　要：基于0.15μm GaAs pHEMT (pseudomorphic High Electron Mobility Transistor)工艺,研制了一款6位数字移相器微波单片集成电路(Monolithic Microwave Integrated Circuit,MMIC).该移相器由六个基本移相位级联组成,工作频带为10~18 GHz,步进值为5.625°,移相范围为0~360°,具有64个移相态.根据最优拓扑选择理论,5.625°,11.25°,22.5°移相位采用桥T型结构,降低了移相器的插损及面积;采用开关型高低通滤波器结构实现45°,90°,180°移相位,提高了大移相位的移相精度,并有效降低了寄生调幅.实测结果表明:64态移相寄生调幅均方根误差小于0.6 dB,移相输入输出回波损耗低于-11 dB,移相均方根误差小于4.2°,基态插入损耗低于8.6 dB.芯片尺寸为3.35 mm×1.40 mm.该数字移相器具有宽频带、高移相精度、尺寸小的特点,主要用于微波相控阵T/R组件、无线通信等领域.This paper proposed a 10~18 GHz wideband 6-bit digital phase shifter MMIC(Monolithic Microwave Integrated Circuit) designed in 0.15 μm GaAs pHEMT(pseudomorphic High Electron Mobility Transistor) technology. The phase shifter was composed of six basic bits,which realizes 64 phase-shifting states with a step value of 5.625° and provides a phaseshifting range of 0~360°. Considering the structural topology optimization,the bridge-T structure is adopted for 5.625°,11.25° and 22.5° phase bits to reduces the insertion loss and area of the phase shifter. The switch type high-low pass filter structure is employed to realize 45°,90° and 180° phase bits,which improves the accuracy of phase and amplitude. The measurement results show that in the range of 10~18 GHz,the input and output return loss of 64 states are all less than-11dB,the insertion loss of reference state is less than 8.6 dB,the RMS(root mean square) phase error of 64 states is less than 4.2°,and the RMS amplitude error of 64 states is less than 0.6 dB. The chip size is 3.35 mm×1.40 mm. The phase shifter has the characteristics of wideband,high phase-shifting accuracy and small size mainly used in transmit/receive(T/R) module of microwave phased array antenna and wireless communication.

关 键 词：GaAs pHEMT 宽带 数字移相器 微波单片集成电路 

分 类 号：TN432[电子电信—微电子学与固体电子学]