交换版机械手支架的模态分析  

Modal Analysis of Support Frame for Mask Exchange Robot

作　　者：刘颖 关宏武[1] 王浩楠 赵东雷 林继柱 LIU Ying;GUAN Hongwu;WANG Haonan;ZHAO Donglei;LIN Jizhu(The 45^(th)Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第2期54-57,63,共5页Equipment for Electronic Products Manufacturing

摘　　要：针对交换版机械手上所用支架,基于有限元理论,运用ANSYS软件进行网格划分和属性定义,进行模态分析。运用LMS Testlab设备进行支架模态试验,结果表明模态仿真结果与试验结果误差在允许范围内,验证了仿真结果和试验结果的准确性、可靠性。为支架的优化设计提供了理论依据,并用于指导实际的生产设计。Based on the theory of Finite Element Analysis(FEA),ANSYS software is used for meshing and attribute definition,and modal analysis is carried out for the support frame of the exchange robot.LMS Testlab equipment is used to carry out the modal test of the support frame,and the results show that the error between the modal simulation results and the test results is within the permissible range.The accuracy and reliability of simulation and test results are verified.It provides a theoretical basis for the optimal design of the support frame and is used to guide the actual production design.

关 键 词：模态试验 有限元分析 支架 掩模版交换 机械手 

分 类 号：TN305[电子电信—物理电子学]