高纯氧化铝基板的制备要点与宇航应用验证实践  

Test and verification of high purity alumina substrate for aerospace applications and key points of manufacturing for high purity alumina substrate

作　　者：王平[1] 王正娟[2] 何飞[2] WANG Ping;WANG Zhengjuan;HE Fei(China Academy of Space Technology(Xi’an),Xi’an 710000,China;Shanghai Institute of Ceramics,CAS,Shanghai 201899,China)

机构地区：[1]中国空间技术研究院西安分院,西安710000 [2]中科院上海硅酸盐研究所,上海201899

出　　处：《空间电子技术》2023年第2期105-111,共7页Space Electronic Technology

摘　　要：通过分析高纯氧化铝陶瓷基板的制备要点,梳理了制备关键工艺与基板特性指标之间的关系,梳理出星用高纯氧化铝陶瓷基板的验证需求,最终提出了高纯氧化铝基板的验证思路,即在将全部验证项目分为构件级和组件级两个大类的基础上,进一步建立起三级验证指标体系。就具体验证项目的设计与实践,进行了细致的分析讨论。得出结论,验证过程体现出的既基于已有标准框架和测试原理,又不拘泥于某一特定标准的原则与思路,不仅适合于构件级的批次稳定性与工艺适用性验证,同样也适用于组件级各验证项目和具体测试方法的确定。在确保构件级和组件级全面、准确验证的前提下,为确保较高的验证效率和较低的验证成本,需要结合标准、测试条件、应用工况三方面综合考虑和细化验证项目条件。This paper analyses the key points of the preparation of high-purity alumina ceramic substrates,sorting out the relationship between the key preparation processes and the substrate characteristics,analysing the verification requirements of high-purity alumina ceramic substrates for star applications,and finally proposing a verification concept for high-purity alumina substrates,i.e.a three-level verification index system based on dividing all verification items into two major categories:component level and assembly level.The paper also provides a detailed analysis and discussion of the design and practice of specific validation projects.The paper concludes that the validation process,which is based on the framework of existing standards and test principles but not on a specific standard,is not only suitable for the verification of batch stability and process suitability at component level,but also for the determination of validation items and specific test methods at component level.In order to ensure comprehensive and accurate verification at both component and assembly level,and to ensure high verification efficiency and low verification costs,it is necessary to consider and refine the verification project conditions in conjunction with the standard,test conditions and application conditions.

关 键 词：高纯氧化铝 基板 宇航应用验证 

分 类 号：V433[航空宇航科学与技术—航空宇航推进理论与工程] TN91[电子电信—通信与信息系统]