射频CO_(2)激光器在玻璃微流控芯片直写微流道探究  

Exploring the Fabrication of Direct-write Microchannels in Glass Microfluidic Chips Using RF CO_(2) Laser

作　　者：刘建军 李文芳 林振衡[1,2] 熊妮 谢海鹤[1,2] LIU Jianjun;LI Wenfang;LIN Zhenheng;XIONG Ni;XIE Haihe(Fujian Provincial Key Laboratory of Precision Measurement and Laser Nondestructive Testing,Putian Fujian 351100,China;School of Electromechanical and Information Engineering,Putian University,Putian Fujian 351100,China)

机构地区：[1]现代精密测量与激光无损检测福建省高校重点实验室,福建莆田351100 [2]莆田学院机电与信息工程学院,福建莆田351100

出　　处：《莆田学院学报》2023年第2期53-59,共7页Journal of putian University

基　　金：福建省自然科学基金资助项目(2019J01811,2021H6038,2022J011166);福建省教育厅中青年教育科学项目(JAT210389)。

摘　　要：为探究采用射频CO_(2)激光器直写载玻片获得微流控芯片微流道的方法,通过光路仿真分析及优化获取理想光斑能量分布,并通过试验设计法研究每英寸点数(PPI)、加工速度、激光功率、加工次数等参数对微流道表面宽度和深度的影响,以及加工速度、激光功率和表面覆盖水膜对微流道加工形貌的影响。结果表明:微流道表面宽度、深度与激光功率、加工次数成线性关系;当PPI取2 000以上、速度取2 000 mm·s-1以上,且激光功率较低、加工表面干燥时,微流道表面较为平滑,崩边较少,加工质量较好。In order to obtain microchannels in microfluidic chip,the method of using RF CO_(2) laser directly writing slide is explored.The ideal spot energy distribution is obtained through optical path simulation analysis and optimization.The influence of PPI,processing speed,laser power,repetition times and other parameters on the width and depth of the microchannels is studied by DOE(design of experiment).The effects of machining morphology of the microchannels on machining speed,laser power and surface covering water film are explored.The results show that when the PPI is higher than 2000 and the velocity is higher than 2000 mm·s-1,the surface of the microchannels is smooth,whose width and depth are linearly related to the laser power and the number of repetition.The surface of the microchannels is relatively smooth and the processing quality proves better when the processing surface is dry with low laser power and less chipping.

关 键 词：微流道 激光加工 射频CO_(2)激光器 

分 类 号：TN248[电子电信—物理电子学]