扫描电子显微镜虚拟实验的教学探索  

Teaching exploration of scanning electron microscope virtual experiment

作　　者：郝鸿儒 徐玲玲[2] 王哲[1] 张伶莉[1] 吕喆[1] 王先杰[1] 魏波[1] HAO Hongru;XU Lingling;WANG Zhe;ZHANG Lingli;LYU Zhe;WANG Xianjie;WEI Bo(School of Physics,Harbin Institute of Technology,Harbin 150001,China;School of Physics&Electronic Engineering,Harbin Normal University,Harbin 150025,China)

机构地区：[1]哈尔滨工业大学物理学院,应用物理专业国家级实验教学示范中心,黑龙江哈尔滨150001 [2]哈尔滨师范大学物理与电子工程学院,黑龙江哈尔滨150025

出　　处：《物理实验》2023年第4期38-43,共6页Physics Experimentation

基　　金：黑龙江省高等教育教学改革研究项目(No.SJGY20210275);教育部高等学校教学研究项目(No.DJZW202001db);哈尔滨工业大学研究生教育教学改革研究项目(No.22MS022);哈尔滨师范大学研究生培养质量提升工程项目。

摘　　要：为提升“现代仪器分析方法”课程教学质量,充分调动学生对实验仪器探索的积极性,在课堂教学过程中引入虚拟实验辅助教学模式.以扫描电子显微镜为例,针对扫描电子显微镜原理、成像分析等教学重点和难点,让学生通过虚拟实验的操作过程,熟悉仪器操作过程,加深对二次电子成像、背散射电子成像和能谱分析的理解.此过程不仅能保证学生的参与度,还能够激发学生的探索欲望.To improve the teaching quality of the modern instrument analysis method course and fully mobilize students’enthusiasm for exploring experimental instruments,virtual experiment assisted teaching mode was adopted in the classroom teaching.Taking the scanning electron microscope as an example,aiming at the teaching emphases and difficulties of scanning electron microscope principle and imaging analysis,the students could be familiar with the instrument operation process through the operation process of virtual experiment,which deepen their understanding of secondary electron imaging,backscattered electron imaging and energy dispersive spectrum analysis.In this process,it could not only ensure students’participation,but also stimulate students’desire for exploration.

关 键 词：扫描电子显微镜 虚拟实验 成像原理 成像分析 能谱分析 

分 类 号：O4-39[理学—物理] TN16[电子电信—物理电子学]