激光直写制备衍射光学元件的研究及应用  

Research and application of diffractive optical element fabricated by laser direct writing

作　　者：梁广磊 孙树峰 王津[1,2] 姜明明 张丰云 王茜 邵晶 曲志浩[1,2] 王萍萍 Liang Guanglei;Sun Shufeng;Wang Jin;Jiang Mingming;Zhang Fengyun;Wang Xi;Shao Jing;Qu Zhihao;Wang Pingping(School of Mechanical and Automotive Engineering,Qingdao University of Technology,Qingdao 266520,China;Shandong Research Center of Laser Green Efficient Intelligent Manufacturing Engineering and Technology,Qingdao University of Technology,Qingdao 266520,China;Qingdao Huanghai University,Qingdao 266427,China)

机构地区：[1]青岛理工大学机械与汽车工程学院,山东青岛266520 [2]青岛理工大学山东省高校激光绿色智能制造技术重点实验室,山东青岛266520 [3]青岛黄海学院,山东青岛266427

出　　处：《红外与激光工程》2023年第4期124-141,共18页Infrared and Laser Engineering

基　　金：国家自然科学基金(51775289);山东省自然科学基金(ZR2018ZB0524);山东省重点研发计划项目(2019GGX104097,2019JZZY010402);高等学校学科创新引智计划(D21017);青岛西海岸新区2020年度科技源头创新专项项目(2020-103)。

摘　　要：衍射光学元件作为一种典型的微光学元件,其体积小、质量轻、设计自由度多、成像质量良好,在光学成像、光学数据存储、激光技术、生物医学等领域具有广阔的应用前景。随着现代光学系统的不断发展,对衍射光学元件的加工效率和制备精度提出了更高的要求。激光直写技术凭借加工精度高、工艺简单、灵活性好等优势,成为制备高精密仪器中关键光学元件所必需的一种加工方式。针对不同的加工需求,开发了多种激光直写系统,并在应用过程中不断地改进升级。另外,突破衍射极限的飞秒激光微纳结构制造技术,能够获得更高的加工精度和更好的分辨率,为微光学元件的制备提供了新的方法。首先介绍了激光直写技术的特点;其次综述了衍射光学元件直写加工技术的研究进展,包括直写技术的影响因素、激光直写系统和多光束加工技术;接着介绍了衍射光学元件的典型应用,如红外成像、色差校正、光束整形、图像显示;最后,对激光直写技术制备衍射光学元件存在的问题和未来发展趋势做出了总结。Significance Micro-optics theory is a new discipline for the study of the design and manufacturing of micronsized and nano-sized optical components,as well as the use of such components to achieve the theory and technology development of light waves.As a research field of optics,diffractive optics is based on the diffraction principle of light waves developed microoptics.Diffractive optical technology is of great significance in realizing lightweight,miniaturization,integration,high efficiency and low cost of optoelectronic systems,and the development of diffractive optical technology has also become one of the important ways to develop modern optical systems.As a typical micro-optical element,diffractive optical elements have broad application prospects in industrial and civil fields such as optical imaging,laser technology,and biomedicine due to their small size,light weight,multiple degrees of design freedom and good imaging quality.The processing methods of optical element can be summarized into two types of mechanical processing and optical processing,both of which have their own advantages and disadvantages.The advent of laser provides a new idea for the preparation of diffractive optical elements.Laser processing is a non-contact wear-free technology with high precision and high flexibility,which can process complex contours and has the characteristic of environmental friendliness and simple production process,so the study of laser processing technology in the application of diffractive optical elements is of great significance.Progress With the continuous development of modern optical systems,higher requirements are put forward for the processing efficiency and preparation accuracy of diffractive optical elements.Laser direct writing technology does not need mask plate in the process of preparing diffractive optical elements,simplifies the steps,shortens the production cycle(Fig.1(a)).There are many factors affecting the preparation quality of diffractive optical elements,the article summarizes the main f

关 键 词：激光直写技术 衍射光学元件 直写系统对比 微纳制造 光学元件应用 

分 类 号：TN249[电子电信—物理电子学]