基于专利导航和文献综述的薄膜热电偶技术发展分析  

Analysis on the Thin-film Thermocouple from the Perspectives of Patent Citation and Literature Review

作　　者：唐瑞 肖洁[1,2,3] 吴洋 张弛 要文波 李传友 TANG Rui;XIAO Jie;WU Yang;ZHANG Chi;YAO Wenbo;LI Chuanyou

机构地区：[1]重庆材料研究院有限公司 [2]国家仪表功能材料工程技术研究中心 [3]高性能测温材料国家地方联合工程研究中心 [4]国网重庆市电力公司营销服务中心 [5]安徽天康(集团)股份有限公司

出　　处：《计量与测试技术》2023年第4期25-29,共5页Metrology & Measurement Technique

基　　金：中国机械工业集团有限公司重大科技专项项目(项目编号:SINOMAST-ZDZX-2019-03);重庆英才计划创新创业示范团队项目(项目编号:CQYC20193223);国家电网有限公司科技项目(项目编号:5700-202227445A-2-0-ZN)。

摘　　要：本文结合专利导航分析和文献综述,对薄膜热电偶专利申请、技术分布、创新主体等展开分析。结果表明:在航空发动机、精密车床、燃料电池等产业的牵引下,薄膜热电偶正处于高速发展阶段,其制备工艺会随微纳加工技术不断进步,且温度敏感元件已从标准热电偶材料向非标、陶瓷、复合等更多方向拓展,目前,中国已成为全球最主要的薄膜热电偶研究地区。因此,应重点关注高温、陶瓷基和复合薄膜热电偶的开发,以及与先进MEMS工艺的结合。Based on patent navigation analysis and literature review,this paper analyzes patent application,tech-nology distribution and innovation subjects of thin-film thermocouples.The results show that:under the traction of aviation engine,precision lathe,fuel cell and other industries,thin film thermocouple is in a rapid development stage,and its preparation process will continue to progress with the micro and nano processing technology,and tem-perature sensitive components have been expanded from standard thermocouple materials to non-standard,ceram-ic,composite and other directions,at present,China has become the worlds most important research area of thin film thermocouple.Therefore,emphasis should be placed on the development of high temperature,ceramic based and composite film thermnocouples,as well as integration with advanced M EMS processes.

关 键 词：专利导航 薄膜热电偶 综述 

分 类 号：TH811[机械工程—仪器科学与技术]