BaTiO_(3)薄膜的制备及其在电光调制器的应用  

Preparation of BaTiO_(3) Thin Film and Its Application in Electro-Optic Modulator

作　　者：任怡静 马新国[1] 张锋 陆晶晶 张力[1] 王晗[1] REN Yijing;MA Xinguo;ZHANG Feng;LU Jingjing;ZHANG Li;WANG Han(School of Chip Industry,Hubei University of Technology,Wuhan 430068,China)

机构地区：[1]湖北工业大学芯片产业学院,武汉430068

出　　处：《人工晶体学报》2023年第4期688-700,共13页Journal of Synthetic Crystals

基　　金：国家自然科学基金(51472081);结构化学国家重点实验室科学基金(20210028);湖北工业大学绿色工业引领计划杰出青年基金(JCRC2021003)。

摘　　要：BaTiO_(3)凭借其较高的电光系数、优良的压电性质和非线性光学性质,成为制备高性能电光调制器的关键材料。其制备方法、实验条件和衬底的选择等决定了薄膜的质量、生长取向和电光系数等,进而影响电光调制器的传播损耗、半波电压、消光比等性能。本文从电光调制器的工作原理出发,围绕BaTiO_(3)薄膜的制备方法、实验条件和薄膜衬底等,探讨了成膜的取向和质量的影响因素,分析了各个BaTiO_(3)薄膜制备方法的优缺点,论述了波导的结构及参数,并展望了未来优化BaTiO_(3)薄膜制备和波导制作工艺的方向。BaTiO_(3) has become the key materials for the preparation of high-performance electro-optical modulators due to its high electro-optical coefficient,excellent piezoelectric properties and nonlinear optical properties.The quality,growth orientation and electro-optic coefficient of the film are determined by the preparation method,experimental condition and the selection of substrate,and further affecting the propagation loss,half-wave voltage and extinction ratio of the electro-optical modulator.Based on the working principle of electro-optical modulator,the factors affecting the orientation and quality of film forming were discussed by focusing on the preparation methods,experimental conditions and film substrates of BaTiO_(3) thin film in this paper.The advantages and disadvantages of each process of BaTiO_(3) thin film preparation were analyzed,the structure and performance of waveguide were discussed.Finally,the direction of optimizing BaTiO_(3) thin film fabrication and waveguide fabrication process in the future were summarized in this paper.

关 键 词：BaTiO_(3)薄膜 电光调制器 波导 电光系数 化学气相沉积法 分子束外延法 

分 类 号：O484[理学—固体物理] O439[理学—物理]