科研反哺促进特种加工实验教学优化革新——单晶锗晶圆光控电解加工实验  

Experimental Teaching Optimization and Reform of Non-traditional Machining Course by Introducing Latest Research Achievements——An Experiment of Laser-Controlled Electrochemical Dissolution of Germanium Wafer

作　　者：朱浩 张朝阳[1] 徐坤[1] 刘洋 Zhu Hao;Zhang Zhaoyang;Xu Kun;Liu Yang(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China)

机构地区：[1]江苏大学机械工程学院,江苏镇江212013

出　　处：《广东化工》2023年第8期236-238,229,共4页Guangdong Chemical Industry

摘　　要：设计了面向本科生的单晶锗晶圆光控定域电解加工实验,利用上表面激光辐照调控材料电导率,实现晶圆背面电化学阳极溶解过程的精确控制,得到高质量凹坑结构。本实验可以直观验证电化学阳极溶解速度取决于电流密度,帮助学生深入理解电解加工原理,同时锻炼学生对激光器、电解电源、扫描电镜等多种设备的使用能力,进一步了解特种加工技术前沿,提升科学素养。An experiment of laser-controlled localized electrochemical machining(ECM)of single crystal germanium(Ge)wafer is designed for undergraduate students.The process of ECM on the lower surface was precisely controlled by laser irradiation on the upper surface,and high-quality pits are obtained on the wafer bottom.This experiment can intuitively verify that the electrochemical anodic dissolution rate depends on the current density,help students deeply understand the ECM principle.Meanwhile,students can learn to use laser,electrolytic power supplyer,scanning electron microscope and other equipment,so as to further understand the frontier of special processing technology and improve their scientific literacy.

关 键 词：单晶锗晶圆 光控电解 电化学反应 实验教学 科研前沿 

分 类 号：G642[文化科学—高等教育学]