微惯性测量单元研究  

Research on Micro Inertial Measurement Unit

作　　者：张燕 王博 ZHANG Yan;WANG Bo(Chongqing Youth Vocational&Technical College Information Engineering Department,Chongqing 400712,China)

机构地区：[1]重庆青年职业技术学院信息工程系,重庆400712

出　　处：《电工技术》2023年第6期13-15,共3页Electric Engineering

基　　金：“基于车载式MEMS捷联惯性导航系统的研究与应用”(编号KJQN 202104103)。

摘　　要：微惯性测量单元(Micro Inertial Measurement Unit,MIMU)具有体积小、功耗低、成本低、可靠性高等特点,在车辆/舰船稳定控制平台、导航控制系统、小型弹类武器制导系统中具有广阔的市场应用前景。陀螺仪及微机械加速度计是MIMU的主要元件,MIMU作为惯性制导系统的核心元件,其体积和性能不但直接影响惯性系统的精度,还决定了它在惯性制导系统的应用范围。主要介绍了基于三轴MEMS陀螺及三轴MEMS加速度计的小体积低成本微惯性测量单元的研究,通过对敏感器件的误差补偿和信号降噪等措施来提高MIMU系统指标精度,使其适用于较高要求的应用领域。Micro Inertial Measurement Unit(MIMU)has the characteristics of small size,low power consumption,low cost and high reliability,and has broad market application prospects in vehicle/ship stability control platforms,navigation control systems,and small missile weapon guidance systems.Gyroscopes and micromachined accelerometers are the main components of MIMU.As the core component of the inertial guidance system,the volume and performance of MIMU not only directly affect the accuracy of the inertial system,but also determine its application range in the inertial guidance system.This paper mainly introduces the research of small-size and low-cost micro-inertial measurement unit based on triaxial MEMS gyro and triaxial MEMS accelerometer.The accuracy of MIMU system specifications is improved by measures such as error compensation and signal noise reduction of sensitive devices,making it suitable for demanding applications.

关 键 词：微惯性测量单元 降噪 温度补偿 交叉耦合补偿 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]