蓝宝石衬底晶圆上片工艺及智能化装备的研制  

Research and 0x09Development of Sapphire Substrate Wafer Loading Process and Intelligent Equipment

作　　者：王晓明 栾庆聪 郭明灿 黄永华[1] WANG Xiao-ming;LUAN Qing-cong;GUO Ming-can;HUANG Yong-hua(Department of Mechanical Engineering,Shandong Vocational College of Science and Technology,Weifang Shandong 261053,China;Weifang Mingzhe Intelligent Technology Co.,Ltd,Weifang Shandong 261021,China)

机构地区：[1]山东科技职业学院机械工程系,山东潍坊261053 [2]潍坊明哲智能科技有限公司,山东潍坊261021

出　　处：《机械研究与应用》2023年第2期158-160,164,共4页Mechanical Research & Application

基　　金：2020年潍坊市科学技术发展计划项目:蓝宝石衬底上片工艺关键技术及智能化装备的研制(编号:2020GX054)。

摘　　要：分析了蓝宝石衬底晶圆上片工艺现状,并结合工艺控制要求,提出了蓝宝石衬底晶圆上片工艺和装备智能化改造方案,设计研制了一种双工位智能化上片工艺装备,该装备采取三轴伺服控制并配合伯努力吸盘实现晶圆无损精准抓取,机器视觉技术配合机器人实现晶圆精准定位和自动装盘,并设计晶圆载具开合、锁紧机构以及升降式载具料筐,实现载具的供给、开合、锁紧、入库等动作。通过样机试验发现,装备功能和工艺精度均取得了良好的效果,满足使用要求,提高了生产效率,从根源解决了因人工操作可靠性和一致性难以保证而引起的晶圆质量问题。In this paper,the current situation of sapphire substrate wafer loading process is analyzed.Based on the requirements of process control,an intelligent transformation programme of process and equipment for the sapphire substrate wafer is put forward;and a kind of dual-position intelligent upper-chip processing equipment is designed and developed.The equipment is equipped with a 3-axis servo control coupled with Bernoulli sucker for nondestructive precision wafer gripping;and the precise wafer positioning and automatic loading could be realized through the machine vision technology with robot.Moreover,the wafer vehicle opening and closing mechanism,locking mechanism and lifting carrier basket are designed so as to implement the supply,opening and closing,locking,putting in storage and other actions of the vehicle.Through the prototype test,the function and precision of the equipment have achieved good results;the result shows that it meets the use requirements,greatly improves the production efficiency,and solves the quality problems caused by manual operation inconsistency from the root.

关 键 词：晶圆 取片机构 视觉寻边机构 载具开合机构 锁紧机构 

分 类 号：TH122[机械工程—机械设计及理论]