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作 者:牛虎 刘泊天 李岩[1] 高鸿[1] 邢焰[1] NIU Hu;LIU Botian;LI Yan;GAO Hong;XING Yan(China Aerospace Components Engineering Center,Beijing 100094)
机构地区:[1]中国航天宇航元器件工程中心,北京100094
出 处:《宇航材料工艺》2023年第2期42-48,共7页Aerospace Materials & Technology
摘 要:派瑞林(Parylene)薄膜主要用于功率电刷的三防,确保电功率的稳定传输。本文对两种规格(17和27μm)Parylene薄膜的厚度、热性能、绝缘性能、在铍青铜上的附着性能以及耐空间辐照性进行了研究。结果表明:通过真空气相沉积法制备的Parylene-C涂覆材料厚度误差可控在2μm内;膜层在铍青铜上的附着力等级为1级,薄膜热分解温度为453℃,两种厚度薄膜击穿电压分别为3.65 kV(17μm)和5.27 kV(27μm);经2.5×1015 p/cm^(2)质子辐照后,膜层外观均完好,附着性能、热性能、绝缘性能仍满足工程使用需求;经2.5×10^(16) e/cm^(2)电子辐照后,膜层出现严重开裂、起皮现象。对电子辐照前后膜层的热性能、红外结构等进行了进一步的研究,分析了电子辐照后膜层的失效机理并获得了Parylene-C涂覆材料膜层耐空间电子辐照上限为1×10^(14) e/cm^(2)。Parylene-C film was mainly used for three-proofings of power brushes to ensure the stable transmission of electric power.The thickness,thermal ability,insulation performance,adhesive force on beryllium bronze and space irradiation resistance of Parylene-C film(specifications:17 and 27μm)were studied.The results show that the thickness error of Parylene-C film made by vaccum gas phase deposition can be controlled within 2μm;the adhesion of Parylene-C on beryllium-bronze is 1 grade;thermal decomposition temperature is 453℃;the breakdown voltage of 17 and 27μm Parylene-C film are 3.65 and 5.27 kV,respectively;the appearance is intact and adhesive force,thermal ability,insulation performance of Parylene-C film can meet the requirements of engineering application after 2.5×10^(15) p/cm^(2) proton irradiation.However,serious cracks and peelings occurr on Parylene-C film after 2.5×10^(16 )e/cm^(2) electron irradiation.At last,the thermal properties and FT-IR of Parylene-C film are further studied before and after electron irradiation,by which,the failure mechanism is analyzed and the electron irradiation upper limit 1×1014 e/cm2 is obtained.
关 键 词:涂覆材料 Parylene-C 电子辐照 质子辐照 绝缘性能
分 类 号:TB34[一般工业技术—材料科学与工程]
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