基于流量分比控制技术的多路配气系统的研究  

The Multi-channel Gas Distribution System Based on Mass Flow Control

作　　者：韦杨杰 高先和[1] 杨冰洁 朱小漫 刘凯 汪海 WEI Yang-jie;GAO Xian-he;YANG Bing-jie;ZHU Xiao-man;LIU Kai;WANG Hai(School of Advanced Manufacturing Engineering,Hefei University,Hefei Anhui 230601,China)

机构地区：[1]合肥学院先进制造工程学院,安徽合肥230601

出　　处：《菏泽学院学报》2023年第2期76-82,共7页Journal of Heze University

基　　金：安徽省高等学校省级质量工程项目(2021jxt);安徽省高等学校校级研究生协同育人基地建设项目(2021Yxt)。

摘　　要：针对国内芯片制造业中对标准气体的需求,在传统的单路配气系统上,研发了多路输入混合标准气体配置系统.运用热式气体毛细管温度衰减测量技术、气体质量流量分比和气体滞后性补偿等原理,构建了以主控制器、气体流量控制系统为一体的闭环配气控制系统.同时通过不同量程的稀释气体的配置,对比了基于数据融合算法和均值滤波算法下的气体流量控制误差,分别为±0.3%和±0.8%.实验表明该系统稳定,误差范围在±0.3%,响应时间不超过30 s.In view of the demand for standard gases in the domestic chip manufacturing industry,this paper changes the traditional single-way system and develops a multiple-input mixed standard gas configuration system.The principles of thermal gas capillary tube temperature attenuation measurement technology,gas mass flow ratio and gas hysteresis compensation are used to construct the integrated closed-loop gas distribution control system of the main controller and gas flow control system.At the same time,by configuring diluted gases of different ranges,the gas flow control error under the data fusion algorithm and the mean filtering algorithm are compared,which are±0.3%and±0.8%respectively.The experiment shows that the system is stable,The experiments show that the system is stable with an error range of±0.3%and a response time of no more than 30s.

关 键 词：气体流量控制 滞后补偿 数据融合处理算法 芯片制造 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]