微型阵列束闸电子束偏转特性研究  

Study on the deflection characteristics of electron beam in micro-arrayed beam blanker

作　　者：张雨露 张利新 刘俊标[1,2] 王文博 殷伯华 韩立[1,2] ZHANG Yu-lu;ZHANG Li-xin;LIU Jun-biao;WANG Wen-bo;YIN Bo-hua;HAN Li(Research Department of Micro-Nano Fabrication Technology and Intelligent Electronic Devices,Institute of Electrical Engineering Chinese Academy of Sciences,Beijing 100190;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院电工研究所,微纳加工技术与智能电气设备研究部,北京100190 [2]中国科学院大学,电子电气与通信工程学院,北京100049

出　　处：《电子显微学报》2023年第2期171-179,共9页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学青年基金资助项目(No.62101528);中国科学院科研仪器设备研制项目(No.GJJSTD20200003);中国科学院特别研究助理资助项目。

摘　　要：为了降低微型阵列式束闸边缘场和邻近电场对多束电子束的偏转影响和串扰,本文以3×3阵列束闸为研究对象,利用COMSOL Multiphysics中的静电和带电粒子追踪模块,研究束闸长宽比、隔离接地极和束闸上方增加接地层对电子束偏转的影响。研究表明,在长宽比不变的情况下,边缘场对电子束偏转的影响在总偏转量中的占比与偏转电压无关;而偏转极板的长宽比越大越有利于精确控制电子束的偏转;通过优化隔离接地电极结构与参数,可减小束闸之间的串扰引起的束斑模糊问题。为了减小边缘场和邻近电场对电子束偏转的影响,本研究分析得出,如果束闸上方接地层的作用范围小于100μm,可在一定程度上抑制串扰的影响。同时,分析表明将接地层上圆孔改为方孔后,也在一定程度上减小了不平衡电场带来的影响。To reduce the deflection effect and crosstalk of multi beam electron optics caused by the fringing field and adjacent field of micro-arrayed beam blanker,we used the modules of electrostatic and charged particle tracing in COMSOL Multiphysics based on a blanker of 3 X 3 array to study the influence of height-to-gap aspect ratio,the length of the grounded wall and the gap between the grounded layer and the beam blanker on the deflection of electron beam.The result show that the influence of the fringing field on the deflection of the electron beam is independent of the deflection voltage when the aspect ratio is constant.The larger aspect ratio of the deflection plate corresponds to the more accurate control of the deflection of the electron beam.The blurred electron beam spot caused by the crosstalk between beam blanker can be reduced by optimizing the structure and parameters of the grounded wall across the aperture.To reduce the influence of the fringing field and adjacent field on the electron beam deflection,the crosstalk can be suppressed when the gap between the grounded layer and the beam blanker is less than 100 p.m.Moreover,the influence of the unbalanced electric field can also be reduced to a certain extent by changing the round hole on the grounded layer to a square hole.

关 键 词：多束电子光学 微型阵列束闸 边缘场 串扰 带电粒子追踪 

分 类 号：TN14[电子电信—物理电子学] TN16[机械工程—光学工程] O463[理学—电子物理学]