化学处理对刀具表面金刚石涂层薄膜的影响研究  

Influence of Chemical Treatment on Diamond Films Coated on Tool Surfaces

作　　者：马骏 曾祥才 吴春涛 汪辉 Ma Jun;Zeng Xiangcai;Wu Chuntao;Wang Hui(Jiuzuan Technology(Chengdu)Co.,Ltd.,Chengdu 610100,China;不详)

机构地区：[1]久钻科技(成都)有限公司 [2]成都工具研究所有限公司

出　　处：《工具技术》2023年第4期23-28,共6页Tool Engineering

摘　　要：阐述了热丝化学气相沉积法(HFCVD)涂覆金刚石涂层时,采用Murakami溶液和HNO3溶液进行化学预处理对刀具表面金刚石涂层薄膜的影响。采用扫描电子显微镜、能谱仪和拉曼光谱仪进行检测,结果表明,硬质合金中的黏结相Co元素和表面粗糙程度对涂层金刚石薄膜有较大影响,采用Murakami溶液浸蚀3min以上、HNO3溶液浸蚀5min以上的刀具涂层表现出优越的性能,刀具寿命是未涂层刀具的2~4.5倍。The influence of chemical pretreatment of Murakami solution and HNO 3 solution on the surface coated diamond film of the tool is described,when hot filament chemical vapor deposition(HFCVD)is coated with diamonds.The phase analysis is carried out by scanning electron microscope,energy spectrometer and Raman spectrometer.The results show that the bond phase Co element and surface coarseness in cemented carbide have a great impact on the coated diamond film.Murakami solution is used to eroded for more than 3 minutes and HNO 3 solution for more than 5 minutes.After the tool is coated,it shows superior machining performance,and the service life of the tool is 2~4.5 times than that of the uncoated tool.

关 键 词：硬质合金 预处理 金刚石薄膜 热丝化学气相沉积 刀具 涂层 

分 类 号：TG71[金属学及工艺—刀具与模具] TG174.4[机械工程—机械制造及自动化] TH162.1