一种频率与温度无关的片内RC振荡器设计  

A design of on-chip RC oscillator with temperature-independent frequency

作　　者：赵宝财 赵宏亮[1] 赵建中[2] ZHAO Baocai;ZHAO Hongliang;ZHAO Jianzhong(School of Physics,Liaoning University,Shenyang 110031,China;IntelliSense Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China)

机构地区：[1]辽宁大学物理学院,辽宁沈阳110031 [2]中国科学院微电子研究所智能感知中心,北京100029

出　　处：《合肥工业大学学报（自然科学版）》2023年第5期616-618,640,共4页Journal of Hefei University of Technology：Natural Science

基　　金：国家科技重大专项资助项目(2016ZX02301002001)。

摘　　要：文章基于SMIC 0.18μm互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)工艺,设计了一种频率与温度无关的片内电流模RC振荡器,该振荡器采用1.8 V电源供电,输出频率为100 MHz,振荡器主要由温度补偿电流源、开关电容充放电回路、反相器比较延时单元以及时钟输出单元组成。通过Cadence Spectre仿真验证表明:在-40~125℃范围内,TT工艺角条件下,振荡器的输出频率范围为100.06~100.16 MHz,频率随温度变化为0.10%,用温度系数表示为6.06×10^(-6)℃^(-1);SS工艺角条件下,振荡器的输出频率范围为99.90~100.23 MHz,频率随温度变化为0.33%,用温度系数表示为20.00×10^(-6)℃^(-1);FF工艺角条件下,振荡器的输出频率范围为99.96~100.07 MHz,频率随温度变化为0.11%,用温度系数表示为6.67×10^(-6)℃^(-1)。Based on the SMIC 0.18μm complementary metal oxide semiconductor(CMOS)process,this paper designs an on-chip current-mode RC oscillator whose frequency is independent of temperature.The oscillator adopts a 1.8 V power supply and the output frequency is 100 MHz.The oscillator is mainly composed of a temperature-compensated current reference,a switched capacitor charging and discharging circuit,an inverter comparison delay unit and a clock output unit.The simulation verification by Cadence Spectre shows that in the range of-40℃to 125℃,the output frequency range of the oscillator is 100.06-100.16 MHz under the condition of TT process angle,and the frequency changes with temperature by 0.10%,expressed as 6.06×10^(-6)℃^(-1) by the temperature coefficient;under the condition of SS process angle,the output frequency of the oscillator is in the range of 99.90-100.23 MHz,and the frequency changes with temperature by 0.33%,expressed as 20.00×10^(-6)℃^(-1) by the temperature coefficient;under the condition of FF process angle,the output frequency of the oscillator is in the range of 99.96-100.07 MHz,and the frequency changes with temperature by 0.11%,expressed as 6.67×10^(-6)℃^(-1) by the temperature coefficient.

关 键 词：RC振荡器 温度补偿 温度系数 电流模 

分 类 号：TN432[电子电信—微电子学与固体电子学]