一种热对流式MEMS二维质点振速传感器  

A novel two-dimensional thermal-convection based MEMS acoustic vector sensor

作　　者：许相园 孙远 赵静 葛浩[4] 鲍明[1,2,3,5] 卢明辉 朱梦尧[6,7] 黎椿建 李晓东[1,2,3] XU Xiangyuan;SUN Yuan;ZHAO Jing;GE Hao;BAO Ming;LU Minghui;ZHU Mengyao;LI Chunjian;LI Xiaodong(Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190;Key Laboratory of Noise and Vibration Research,Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190;University of Chinese Academy of Sciences,Beijing 100049;National Laboratory of Solid State Microstructures&Department of Materials Science and Engineering,Nanjing University,Nanjing 210093;School of Automation,Northwestern Polytechnical University,Xi'an 710072;Huawei Terminal Co.,Ltd.,Shenzhen 518129;School of Communication&Information Engineering,Shanghai University,Shanghai 200444)

机构地区：[1]中国科学院声学研究所,北京100190 [2]中国科学院噪声与振动重点实验室(声学研究所),北京100190 [3]中国科学院大学,北京100049 [4]南京大学固体微结构物理国家重点实验室&现代工程与应用科学学院,南京210093 [5]西北工业大学自动化学院,西安710072 [6]华为终端有限公司,深圳518129 [7]上海大学通信与信息工程学院,上海200444

出　　处：《声学学报》2023年第3期541-548,共8页Acta Acustica

基　　金：国家自然科学基金项目(11774379)资助。

摘　　要：由空气质点振速传感器和声压传感器组成的矢量传声器是测量声场空间信息的重要方式。本文设计了一种新型热对流式二维质点振速传感器,不同于传统平行线式传感机制,该器件由多线进行交叉连结形成一个中央十字加热器和四个直角测温线,构成新的局域加热和温度传感方式,基于此设计能够获得更高的灵敏度并具有理想的正交性。通过数值分析对其传感机制进行了详细分析,并使用MEMS工艺进行器件制备和性能验证。实验结果表明,该器件具有良好的响应灵敏度和接近完美的正交指向性。所提出器件在体积受限的声场测量中具有潜在应用价值。An acoustic vector sensor is an important sensor for capturing sound field information.In various applications,a precise integrated 2D sensor is desired,but manufacturing remains challenging.A novel 2D thermal convection based acoustic vector sensor is introduced,which consists of crossed multiple wires.The central crossed wire acts as a heater and the four right-angle shape wires act as thermal detectors.Based on this design,the sensor provides higher sensitivity and a direct two-dimensional acoustic particle velocity measurement.The sensor is optimized by numerical simulation and then fabricated using MEMS process.Finally,experiments have demonstrated that the device has good sensitivity response and orthogonal characteristics.

关 键 词：二维矢量传声器 质点振速 热线式传感器 微加工 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]