基于修正三次样条插值的红外SF_(6)气体传感器高精度标定方法  

High Precision Calibration Method for Infrared SF_(6) Gas Sensor Based on Modified Cubic Spline Interpolation

作　　者：宋栓军[1] 张婕 程彪 SONG Shuan-jun;ZHANG Jie;CHENG Biao(School of Mechanical&Electrical Engineering,Xi’an Polytechnic University,Xi’an 710048,China)

机构地区：[1]西安工程大学机电工程学院,陕西西安710048

出　　处：《仪表技术与传感器》2023年第4期1-6,共6页Instrument Technique and Sensor

基　　金：国家自然科学基金青年科学基金项目(61701384);西安市科技计划先进制造业技术攻关项目(21XJZZ0016);陕西省重点研发计划项目(2023-YBGY-349)。

摘　　要：针对红外SF_(6)气体传感器存在温漂及标定精度较低的问题,提出一种基于修正三次样条插值的传感器高精度标定方法。采集传感器在不同温度、不同体积分数下的输出电压,按照误差小于总量程的2%为标准设置插值步长,对输出电压-体积分数曲线进行三次样条插值。在此基础上,利用相对误差的平均值修正插值结果。通过线性插值对同一体积分数的温度进行补偿,最终得到SF_(6)气体体积分数预测模型。对6只红外SF_(6)气体传感器分别使用三次样条插值、三次Hermite插值和多项式函数拟合的方法进行数据插值标定。结果显示:采用修正三次样条插值的标定方法可将误差控制在1.2%以内,标定的数据合格率达到99%。该方法标定过程简单、精度高,并且考虑了温度的影响,可广泛应用于大批量红外传感器标定。To solve the problems of temperature drift and low calibration accuracy of infrared SF_(6) gas sensor,a high-precision calibration method of sensor based on modified cubic spline interpolation was proposed.The output voltages of sensors at different temperatures and concentrations were collected,and the interpolation step size was set according to the standard that the error was less than 2%of the total range,and cubic spline interpolation was performed on the output voltage-concentration curve.On this basis,the interpolation results were corrected by using the average of relative errors.Then the temperature at the same volume fraction was compensated by linear interpolation,and finally the SF_(6) gas volume fraction prediction model was obtained.Six infrared SF_(6) gas sensors were calibrated by cubic spline interpolation,cubic Hermite interpolation and polynomial function fitting.The results show that the calibration method with modified cubic spline interpolation can control the error within 1.2%and the calibrated data pass rate reaches 99%.This method has the advantages of simple calibration process,high accuracy and considering the influence of temperature,so it can be widely used in a large number of infrared sensor calibrations.

关 键 词：SF_(6) 红外气体传感器 高精度标定 三次样条插值 温度补偿 

分 类 号：TH74[机械工程—光学工程]