三角剪切型压电加速度传感器固有频率计算及优化  

Natural Frequency Calculation and Optimizationof Triangular Shear Piezoelectric Accelerometer

作　　者：肖峰 彭斌[1] 张万里[1] XIAO Feng;PENG Bin;ZHANG Wan-li(University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices,Chengdu 610054,China)

机构地区：[1]电子科技大学,电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《仪表技术与传感器》2023年第4期11-14,71,共5页Instrument Technique and Sensor

摘　　要：针对应用于高温环境的剪切型压电加速度传感器,建立了固有频率的计算模型,研究了刚度和几何结构参数对加速度传感器固有频率的影响。研究结果表明:该模型计算结果和有限元仿真结果基本一致。三角支柱的法向刚度对传感器整体刚度的影响最大。中心支柱的几何尺寸对固有频率影响最大,质量块的长宽以及压电片高度对固有频率也有较大影响。优化后的传感器实物样品,固有频率较优化前实现了约20%的提升,符合理论变化趋势。该计算模型和计算结果有助于优化三角剪切型压电加速度传感器。For the shear piezoelectric accelerometer applied in high temperature environment,the calculation model of natural frequency was established,and the effects of stiffness and geometrical parameters on the natural frequency of the accelerometer were studied.The research results show that the calculation results of the model were basically consistent with the finite element simulation results.The normal stiffness of the triangular struts has the greatest impact on the overall stiffness of the sensor.The geometric size of the central pillar has the greatest influence on the natural frequency,and the length and width of the mass block and the height of the piezoelectric sheet also have a great influence on the natural frequency.The natural frequency of the optimized sensor sample is about 20%higher than that before optimization,which is in line with the theoretical trend.The calculation model and calculation results help to optimize the triangular shear piezoelectric accelerometer.

关 键 词：压电 加速度传感器 固有频率 刚度 等效质量 弹簧 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]