基于流固耦合的气体静压导轨侧向静态特性分析  

Analysis of the Static Performance of the Lateral Carriage of the Aerostatic Guideway Based on the Fluid-Solid Coupling

作　　者：姚建华[1,2] 尹自强 杨义军 柴宁[1,2] YAO Jian-hua;YIN Zi-qiang;YANG Yi-jun;CHAI Ning(Guangdong Provincial Key Laboratory for Micro-nano Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China;State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Jointly Built by the Province and Ministry,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学广东省微纳加工技术与装备重点实验室,广州510006 [2]广东工业大学省部共建精密电子制造技术与装备国家重点实验室,广州510006

出　　处：《组合机床与自动化加工技术》2023年第5期14-18,共5页Modular Machine Tool & Automatic Manufacturing Technique

基　　金：国家自然科学基金面上项目(51575520)。

摘　　要：气体静压导轨的结构变形会造成气膜的压力分布与理论模型存在明显偏差,从而影响了其静态特性。研究建立了气体静压导轨的流固耦合模型,分析了导轨两侧气膜压力分布与结构变形的关系;此外,通过双向流固耦合仿真,得到了在不同位置外力作用下气体静压导轨的承载能力和位移的关系,以及导轨变形情况和位移的关系,分析了不同位移下导轨变形与承载力的关系。最终通过实验对流固耦合仿真数据进行了验证,得出流固耦合仿真数据与实验结果较为吻合,在不同位置的外力作用下的气体静压导轨的静态特性相差较大。The structural deformation of aerostatic guideway will cause the obvious deviation between the pressure distribution of the gas film and the theoretical model,thus affecting its static characteristics.In this study,a fluid-structure coupling model of aerostatic guideway is established,and the relationship between the gas film pressure distribution on both sides of the guideway and the structural deformation is analyzed.In addition,through two-way fluid-structure coupling simulation,the relationship between bearing capacity and displacement of aerostatic guideway under the action of external force at different positions,and the relationship between guideway deformation and displacement are obtained,and the relationship between guideway deformation and bearing capacity under different displacement is analyzed.Finally,the fluid-structure coupling simulation data is verified by experiments.It can be concluded that the fluid-structure coupling simulation data are in good agreement with the experimental results,and the static characteristics of aerostatic guideway under the action of external forces at different positions differ greatly.

关 键 词：多孔质气体静压导轨 双向流固耦合 刚度 计算流体力学(CFD) 

分 类 号：TH165[机械工程—机械制造及自动化] TG659[金属学及工艺—金属切削加工及机床]